- 學位論文
高速表面瑕疵深度檢測系統
A High-Speed Inspection System for Depth Detection of Surface Defects
摘要
隨著代工產業的進展，各種產品的全檢需求愈來愈多，以i-pad背板的瑕疵檢測而言，須達到每片15秒內、深度檢出率為1μm的規格，但目前並無合適的自動化檢測設備問世，現階段產業仍以人工檢視為主流，因而常面臨瑕疵檢測良率不穩定以及廠商人事成本與日俱增之窘境，故本研究遂針對生產線末端產品的尺寸與瑕疵檢測，構思一套高速表面瑕疵深度檢測系統，期盼能取代人工而達到自動化檢測目標。 本研究係使用4K之黑白線型感光耦合元件(Charge-coupled Device，CCD)進行線掃描擷取影像，取像line rate最高可達54 KHz，利用數位光源投射系統投射光柵並搭配高速線性移動平台模擬輸送帶運送，建構一套高速、高解析度表面瑕疵深度檢測系統。本系統係以相移演算法與投射條紋法為基礎，執行瑕疵與尺寸檢測，傳統相移法通常必須擷取至少三張干涉影像，而本簡化型相移干涉法中僅需擷取兩張干涉影像與一張參考光影像，即可求出區域中之相對高度分佈，達到量測物體表面瑕疵深度的目的。 為了驗證本系統之精度，採用三種不同高度標準階高片，分別為1.12 mm、1.14 mm、1.15 mm，使其合併後進行量測，得到平均階高為20.224±0.69 ( 2σ) μm 和10.18±1.12 ( 2σ) μm，可知本系統目前之檢測精度可達1μm 。整體而言，以本研究量測技術為主軸，有足夠的能力達成高速、高精度、高解析及半自動的產業檢測需求。
並列摘要
With the development of the foundry industry, increasing demand for the product is detected. In defect detection on i-pad backplane for example, is required 15 seconds of each piece, the defect detection rate was 1μm. There is no suitable automated testing equipment, is still manual inspection. Therefore manufacturers faced with defect detection instability and increase personnel costs. The study idea of a high-speed inspection system for depth detection of surface defects A High-Speed Inspection System for measuring product size and defect detection. Look forward to replace the manual and achieve automatic detection. The system using 4K monochrome linear charge-coupled device to scan image, it line rate up to 54 KHz, using digital light projection system projection grating and with high-speed linear platform simulation conveyor transport, constructed a high-speed, high-resolution inspection system for depth detection. System based on phase shifting and projected fringe to defect and size detection. Traditional phase shift method must capture at least three interference image, but this study only capture two interference image with a reference light image. To calculate area relative height distribution by phase reduction, it can measure the depth detection of surface defects. In order to verify accuracy of the system, using three different standard gauge block, 1.12 mm, 1.14 mm, 1.15 mm, merger three block and measure. The average was 20.224±0.69 ( 2σ)μm and 10.18±1.12 ( 2σ)μm. Result shows that the system accuracy can reach 1μm. Overall, this study measurement technique have ability to achieve high-speed, high-accuracy, high-resolution and semiautomatic industrial detection.