可程式控制之水平調整機構研製

近年來隨著微奈米科技的迅速發展，產品設計更趨輕、薄、微小，因此精密量測技術需求愈來愈高，其中以光學干涉技術執行輪廓量測是最常應用的設備之ㄧ，透過高解析三維表面輪廓干涉量測儀器，可檢視出微小元件之外觀形貌、階高、表面粗糙度等，以達到嚴格的品質控管。本研究係開發一套適合運用在光學干涉輪廓儀探頭組上之微轉動機構，目的係將干涉條紋展平，以降低量測誤差。本系統設計重點為可執行兩個互相垂直方向的轉動，系統轉動角度規格為解析度優於0.0025°，搭配五相步進馬達輸出脈衝帶動齒輪、螺桿做動，讓探頭平台產生微小擺動，使物鏡輸出之光路與待測物垂直，減少因夾角造成之量測死角，因此量測之數值可更為精確。設計過程係利用以特徵為基底的機械設計軟體SolidWorks建立3D實體模型及進行幾何設計的修改，並透過商用有限元素分析軟體，將結構做應力、變形之分析。實驗結果顯示，透過水平調整機構量測階高標準片之標準差為15nm，優於未調平之數值96nm，確定水平調整機構於光學干涉輪廓儀之重要性。

關鍵字

光學干涉輪廓儀；調平；轉動機構

並列摘要

With the rapid development of science and technology in recent years lighter, thinner and smaller products are evolved. Precise measurement technique is necessary to measure these small components. The facial feature, step height, roughness etc. of small components are examined by high resolution 3D profile and surface measurement instrument. The product should have a strict quality management. This investigation describes about the development of a rotational mechanism by using optical probes of interference instrument. In order to level the measured stage, the 3D model product can be modified rapidly by using the parametric and feature-base system – SolidWorks. Through the COSMOS, software of finite element analysis, the stress and distortion are analyzed. The system has two rotational directions which are perpendicular to each other. The rotational angle is ±5° and resolution is better then 0.0025°. When the stepping motor transmits signals to the gear and the screw, the stage swings. The ray in the field lens is perpendicular to the object. It becomes faint when the ray and the object are not perpendicular. As a result more accurate results can be achieved. The experimental result shows that the standard deviation with the leveling mechanism is 15nm. Nevertheless, the result is 96nm without leveling. So the leveling mechanism is important for optical interference instrument.

並列關鍵字

optical of interference instrument ； rotational mechanism ； leveling

參考文獻

[3] H. MacCallion, P. T. Pham, “The Analysis of a Six Degree of Freedom Workstation for Mechanized Assembly,”5th World Congress on Theory of Machines and Mechanisms, Montreal, pp. 611-616, 1979.

[4] George Mauro, 26 Keewaydin Dr., Suite B, Salem, “Goniometer”, U.S. patent 6,705,019 , Mar. 2004.

[5] William F. Koeppen, “Machien-vise”, U.S. patent 650,644, May 1900.

[8] J.N. Reddy, “An Introduction to the Finite Element Method”, McGraw-Hill, New York, 1993.

[9] R.H. Gallagher, “Finite Element Analysis:Fundamentals”, Prentice-Hall, Englewood Cliffs, N.J..,1975

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可程式控制之水平調整機構研製

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