主動式磁浮軸承動態主軸位移磁 感測系統設計及測試

Design and Test of the Magnetic Position Sensor System of Dynamics Spindle Active Magnetic Bearings

沈俊男(Chun-Nan Shen)

指導教授 ： 康淵

中原大學/工學院/光機電及資電控產業研發碩士專班/碩士(2007年)

https://doi.org/10.6840/cycu200700851

摘要

本論文是根據現有真空幫浦的數據測試，自行繞製差動變壓器來量測主軸的位移量，並設計類比式的位移感測器電路進行訊號處理，並且測試差動放大輸出電壓比值以及位移感應大小。
差動變壓器型式位移感測電路包含振盪電路、功率放大電路、濾波電容之整流電路、差動放大器電路及非反相放大電路等。利用XYY軸精密自動定位平台量測其位移，XYY軸移動量可達0.01mm，使操作者可正確量測主軸的位移量，達到量測的目的。
差動變壓器型式位移感測電路可量出靜態輸出電壓比值以及位移感應大小，實驗結果具有較好的線性度及較高的靈敏度。動態上是用模態分析軟體以加速規及感測器為時域信號輸出，衝擊鎚敲擊主軸為時域信號輸入，由頻譜分析儀以快速傅立葉轉換得到振幅值及相角，最後以電容式位移計規格為基準與差動變壓器感應輸出零電壓比較在頻譜分析上之差異，以及量測頻率範圍。

關鍵字

差動變壓器 ； 衝擊鎚 ； 電容式位移計 ； 主軸

並列摘要

This thesis is proceeded with the testing result data of the present vacuum pump, Leading the design of a differential transformer which measures the spindle of displacement, design a analog type displacement sensor circuit process deal with signal, and tests differential amplify output voltage size and displacement reaction ratio.
Differential transformer type displacement sensor circuit include a sine wave oscillation circuit, power amplification circuit, filter capacitor rectification circuit, differential amplifier circuit and Noninverting amplification
circuit etc, utilize XYY accurate automatically position platform and measures displacement, XYY axle's moving amount can reach 0.01mm, to make operator accurate measures spindle displacement amount, achieve the goal of measuring and examining.
Differential transformer type displacement sensor circuit measure Static output voltage size and displacement reaction ratio, experiment result linearity and well sensitivity, dynamically using Modal analysing software
to analyse Accelerometers and sensor the time domain output signal. and with Impact Hammer beating the spindle to the time domain input signal,The fast fourier transform of Frequency spectrum analyse could form Magnitude value and phase. Lastly, Capacitance sensor specification do basis and differential transformer reaction output zero voltage compare in frequency spectrum analyse the difference,and measures its frequency range.

並列關鍵字

Impact Hammer ； Capacitance sensors ； spindle ； Differential transformer

參考文獻

[10] 賴建宏，馬達臨界轉速之測量及模態測試，碩士

麥格羅希爾國際股份有限公司，1999。

SE ，台北，台科大圖書股份有限公司，2000。

Transformer Position Transducer”,

IEEE TRANSACTIONS ON MAGNETICS,VOL.38,NO.2,