隨著奈米科技的迅速擴展,微型組裝技術的建立已成為時勢所趨,本研究以組裝微奈米元件為目標,設計與開發出一台可在掃描電子顯微內部執行微奈米加工與組裝的多自由度奈米機械操控系統。奈米機械操控系統是由數個獨立的操作單元組合而成,每個獨立單元都具備三個線性平移自由度(X,Y,Z),每個線性移動平台總行程為±5mm,最小步進量可以達到30奈米的位移,其整體系統尺寸約為180mm×180mm×69mm。 於微奈米元件組裝部份,利用奈米機械操控系統多自由度之優點,將奈米線以電子照射誘發沉積法 (Electron Beam Induced Deposition, EBID),逐一的進行奈米線結構組裝,於原子力顯微鏡(AFM)探針或自製鎢針之上,完成複雜的微奈米立體結構的建構,並且利用奈米材料本身的機、電特性,組立各種微奈米器件,如奈米緩衝器、奈米邏輯閘。
With the rapid expansion in nano technology, the establishment of micro construction technology has become paramount. This study focuses on the construction of micro components to design and develop a non-restrictive mechanical nano manipulation system operable within a SEM. The control system is composed of several stand-alone construction elements, with each element allowed freedom of moment on three axis (X, Y, Z). The total movement span reaches ±5mm, with a minimum increment of 30nm. The total construction dimension is 180mm 180mm 69mm. Nanowires are used in conjunction with EBID in nano assembly, via the control system and using an AFM cantilever or tungsten tip under SEM to complete the complex construction of 3-dimensional micro-nano structures. Using the electro-mechanical characteristics of the nano materials micro-nano components can be constructed such as a nano Force-absorber or nano-scale logic gate.