金奈米線機械性質測試技術研究

Testing Techniques for Mechanical Characterization of Gold Nanowire

張鋒政(Fong-Cheng Chang)

指導教授 ： 章明

中原大學/工學院/機械工程研究所/碩士(2009年)

https://doi.org/10.6840/CYCU.2009.00828

摘要

本研究以一套可在掃描式電子顯微鏡(Scanning Electron Microscope, SEM)內部執行三維奈米機械操作之系統，使用挫屈、彎曲、拉伸等試驗方法，對金奈米線進行機械性質測試研究。此系統整合壓電馬達、精密移動平台等設備，建構出一個三個平移軸及一個旋轉軸之四自由度的精密操作系統，具有在立體空間中進行奈米操作的功能。 在機械性質量測部份，本研究以電子照射誘發沉積法 (Electron Beam Induced Deposition, EBID)將單根金奈米線固定於原子力顯微鏡(AFM)探針上，根據彎曲、挫曲及拉伸試驗等不同的量測方式，分別將金奈米線安裝於不同的位置與角度，以掃描式電子顯微鏡所擷取的影像，分析探針懸臂樑變形量和奈米線形變，搭配高解析度之場發式掃描式電子顯微鏡(SEM S-4100)量得之截面積，應用材料力學之基礎理論公式，即可算出金奈米線之機械性質。目前以彎曲試驗測得楊氏模數約為21.14±2.77GPa 挫屈試驗測得楊氏模數約為22.18±1.23GPa及拉伸試驗測得楊氏模數21.36GPa、降伏應力125.34MPa 與破裂強度222.15MPa。

關鍵字

拉伸試驗 ； 奈米操作系統 ； 金奈米線 ； 電子照射誘發沉積法 ； 挫曲試驗 ； 掃描式電子顯微鏡 ； 彎曲試驗

並列摘要

The present investigation describes about the applications of a four degrees of nanomanipulator system for nanomechanical characterization of gold nanowire by bending test, buckling test, and tension test inside a scanning electron microscope (SEM). The nanomanipulation system consists of precisely machined platform, picomotors and monolithic-silicon-based tips which are generally used in atomic-force microscopes (AFM). The electron beam induced deposition (EBID) method is used to clamp NWs to the AFM tips attached to the nanomanipulator platform inside the SEM vacuum chamber. The nanomechanical characterization of the NWs is determined using the basis of theoretical formula of mechanics of materials. To measure the cross sectional area of the NWs, aluminum is coated on NWs to improve resolution of SEM images. The Young’s modulus of gold NWs has been measured by bending test, buckling test, and tension test to be 21.14±2.77GPa, 22.18±1.23, and 21.36GPa, the Yield Strength and Rupture Strength has been measured by tension test to be 125.34MPa and 222.15Mpa.

並列關鍵字

tension test ； buckling test ； scanning electron microscope ； nano-manipulate system ； goldnanowire ； electron beam induced deposition ； bending test

參考文獻

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