掃描式電子顯微鏡下的三維奈米加工系統

Three-dimensional Nano-Machining System under a Scanning Electron Microscope

吳旻禧(Wu-Min Xi)

指導教授 ： 章明

中原大學/工學院/機械工程學系/碩士(2006年)

https://doi.org/10.6840/CYCU.2006.00474

摘要

摘要
本研究以開發一套可在掃描式電子顯微鏡(SEM)內部執行三維加工的機械操作系統，並利用分子動力學理論與加工的實驗結果，來研究三維奈米探針加工的機制與各項參數的效應。理論模式係根據材料特性運用分子動力學模擬加工過程，並對於切削力、加工深度等形成機制進行分析，以求得奈米加工的行為及特性。實驗部分則為整合壓電馬達、精密平台等設備，並搭配原子力顯微鏡使用的矽(monolithic silicon)探針，在電子掃描顯微鏡的真空腔內部構建出一套精密的三維奈米加工設備，此加工平台有XYZ三個平行軸及一個旋轉軸，加工解析度為30nm，搭配玻璃上所濺鍍之鋁、金等奈米材料，進行實作加工並根據理論分析之誤差可製作出奈米線並刻劃出清晰可辨的奈米文字。

關鍵字

分子動力學 ； 奈米三維加工系統 ； 掃描式電子顯微鏡

並列摘要

Abstract
This research strives to develop a system that can perform three-dimensional machining under the Scanning Electronic Microscope (SEM). It uses the theories of molecular dynamics and engineered sample results to study the various parameters of the mechanics of three-dimensional nano-machining. The theoretical model examines cutting speed, feed and chip formation mechanism to identify the actions and characteristics of nano-machining; achieved by simulating the machining processes of various material characteristics.
The experimentation section was set up with a precise machining platform integrated with piezomotors, combined with linear stages and monolithic-silicon-based tips used in atomic-force microscopes, enabling manipulation under a scanning electron microscopy.
The platform includes three-dimensional stages of XYZ axis and one rotational stage, with a resolution of 30nm. When partnered with nano-materials such as Au and Al coding on glass and base on the inaccuracy of theory , it can produce nano- lines which could make up readable nano-words.

並列關鍵字

molecular dynamics. ； three-dimensional nano-machining system ； scanning electronic microscope

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