雷射加工機大面域誤差量測系統

Large-Field Error Measurement System for Laser Machine Tools

魏旭宏(Hsu-Hung Wei)

指導教授 ： 章 明

中原大學/工學院/機械工程研究所/碩士(2010年)

https://doi.org/10.6840/cycu201001002

摘要

本文主要是針對非傳統三軸加工機中的雷射切割機台研製一套低成本大面域之誤差量測系統，利用雷射二極體及四象限位置感測器作為誤差量測的主要元件，並自製雷射二極體驅動電路模組及四象限位置感測器電路模組，取代高單價商用級位置感測器訊號處理器模組，以達到簡易操作、低成本、大面域及高精度之量測目標。
本研究藉由此大面域量測系統檢測雷射加工機真直度誤差，並利用此系統建立雷射加工機台的3D誤差地圖，系統的量測精度可達1μm，量測出的誤差結果可提供為工具機的校正應用，亦可協助工程師方便檢視機台的誤差源，目前已實際應用於大面域龍門式工具機台的誤差量測與校正。

關鍵字

大面域 ； 誤差量測 ； 雷射二極體 ； 四象限位置感測器 ； 3D誤差地圖

並列摘要

This paper focuses on the development of a cost effective large-field error measurement system for laser machine tool in the non-traditional three-axis machining system. It uses a laser diode and position sensing detector as the main components for error measurement. The laser diode driving circuit and position sensing detector sensing circuit are self-developed, therefore can replacing commercial high cost sensor modules to achieve targets ease of use, low cost, large-field and high-precision measurement, et cetera.
This study uses such an error measurement system to detect the straightness and flatness of a laser machining tool, and using the system to construct a three-dimensional error map of the laser machining tool. The measurement precision of the system can reach up to 1 μm, and the measurement results can be used for the calibration of the machine tool, even supporting engineers in investigating the error sources of machine tools. Currently, it is actively used in the error measurement and calibration of long travel range bridge type machine tools.

並列關鍵字

three-dimensional error map. ； laser diode ； error measurement ； large-field ； position sensing detector

參考文獻

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