- 學位論文
應用於表面與內部形貌量測之光學干涉技術
Optical interferometric techniques for measurement of surface- and interface-morphology
摘要
本研究以麥克森干涉儀為基礎提出與建立多個應用於表面與內部形貌量測之光學干涉技術，克服或改善現有應用於表面與內部形貌量測光學技術之困難。本文分三個主題，分別為複合干涉儀、內視型光學同調斷層攝影術與緻密光延遲線。我們改良麥克森干涉儀架構建立複合干涉儀，並配合光源同調與低同調之干涉特性，使系統具奈米準確度的表面與內部形貌量測之能力，建立應用於表面形貌量測系統之光纖式複合干涉儀與應用於浸沒樣品形貌量測之低同調複合干涉儀。在內視型光學同調斷層攝影術中，我們在系統的樣品端使用磁驅動掃描內視鏡探頭，解決了遠端旋轉掃描方法的內視鏡探頭在進行掃描時，部分造影區被遮蔽的問題。最後，我們設計一個結構緻密簡單且可快速長行程掃描的光延遲線系統應用在麥克森干涉儀之參考端建立低同調反射儀，使系統能快速獲得樣品內部形貌資訊。
並列摘要
We proposed and demonstrated some optical interferometric techniques based on a Michelson interferometer to improve or overcome the problems of conventional optical techniques for measurement of surface- and interface-morphology. There are three technique topics in this thesis, where are composite interferometer (CI), endoscopic optical coherence tomography (EOCT) and compact optical delay line (CODL). We proposed and demonstrated a composite interferometer by improving the configuration of a Michelson interferometer. By using a coherent light and low-coherence light as a light source, CI possesses the capability of measurement of surface- and interface-morphology with nanometer accuracy, and we built a fiber-based composite interferometer for measurement of surface morphology and a composite low-coherence interferometer for surface morphology of immersed sample. In the topic of EOCT, we used a magnetic driven scanning endoscopic probe for scanning sample in the sample arm of EOCT to avoid the blocking a portion of imaging field which caused by conventional distal rotary scanning method. Finally, we designed and fabricated a CODL for rapid and long-range axial scanning in the reference arm of a Michelson interferometer to build a low-coherence reflectometer. By using CODL, the low-coherence reflectometer can obtain interface morphology rapidly.