在多孔矽基板上生長氧化鋅/硫化鋅奈米核殼結構之表面形貌與定性之研究

Morphology and Characterizations of Zinc Oxide / Zinc Sulfide Core/Shell Nanostructures Synthesized on Porous Silicon Substrate

洪宸浩(Chen-Hao Hung)

指導教授 ： 陳祥

國立暨南國際大學/科技學院/應用材料及光電工程學系/碩士(2019年)

https://doi.org/10.6837/ncnu201900075

摘要

在此篇論文中，我們以氟化氫(HF)搭配硝酸銀顆粒，在矽基板上蝕刻以生成多孔矽基板(PS)，再接著以旋塗法塗覆氧化鋅晶種層，最後以水熱法生長氧化鋅奈米柱，以及二次水熱法以生成硫化鋅奈米殼層，再將得到之結果，以場發射式電子顯微鏡(FESEM)、穿透式電子顯微鏡(TEM)研究其表面形貌，對於材料結構與光學特性部分，我們使用了能量色散X-射線光譜儀(EDX)、X射線繞射分析儀(XRD)、化學分析電子能譜儀(XPS)與微光致螢光光譜儀(PL)去進行分析。
我們在第二次水熱法中，以硫化鈉將先前在多孔矽基板上生長之氧化鋅奈米柱的外殼進行硫化，分別以不同的時間去進行第二次的水熱法硫化氧化鋅，得到高品質的氧化鋅硫化鋅奈米核殼結構，分析結果顯示，此種在多孔矽基板上，生長氧化鋅硫化鋅奈米核殼結構是一種十分特殊的結構，而微光致螢光光譜儀的分析也顯示，與單純在多孔矽基板上合成氧化鋅奈米柱相比，這種核殼結構具有較佳的光學特性，未來將可應用在更多感測器、半導體及光電元件層面上。

關鍵字

氧化鋅 ； 硫化鋅 ； 多孔矽 ； 奈米核殼結構 ； 水熱法

並列摘要

In this thesis, we firstly adopted hydrogen fluoride (HF) and silver nitrate (AgNO3) to fabricated the porous silicon (PS) substrate. Afterwards, ZnO nanorods seed layer were deposited on substrate by spin-coating method. Then, through the hydrothermal mechanism, ZnO nanorods were grown on the PS. In order to obtained the ZnO/ZnS core/shell nanostructures, we carried on the second time of hydrothermal process but adjusted the solvent to sodium sulfide (Na2S). The morphology of the ZnO/ZnS core/shell nanostructures were analyzed by scanning electron microscopy (SEM) and transmission electron microscope (TEM). Energy-disperse X-ray spectroscopy(EDX), X-ray diffractometer(XRD), and Photoluminescence (PL) were employed to investigate the characterization of ZnO/ZnS core/shell nanostructures.
In our second-hydrothermal section, the solvent was replaced into Sodium sulfide for the purpose of vulcanized the outer shell of ZnO NRs. Through Photoluminescence(PL) analysis, results indicated that with the ZnS coated, the optical properties were enhanced. During few steps and low-cost method, the fabrication of ZnO/ZnS core/shell nanostructures on porous silicon could be achieved, which provides a potential material could be applied on optoelectronic devices.

並列關鍵字

ZnO ； ZnS ； porous silicon ； core/shell nanostructures ； hydrothermal

參考文獻

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