本篇論文主要是研究V 頻帶平面型CMOS天線與濾波器之應用與特性,研究主題主要分成兩個部分: 第一部份是利用TSMC 0.18-μm CMOS 製程設計V 頻帶平面型CMOS天線,其中包含了24/60GHz雙頻帶折曲天線、60GHz槽孔天線及60GHz八木天線;且天線饋入訊號源皆採用共面波導之饋入架構,對於天線設計與模擬,採用Ansoft HFSS 電磁模擬體。第二部份為利用TSMC 0.13-μm CMOS 製程設計V 頻帶平面型CMOS 濾波器,利用MSL電感實現所提出的60-GHz 帶通濾波器的架構。 24/60GHz雙頻帶摺曲天線方面,在10-25GHz及59-66.5GHz之S11皆小於-10dB;24GHz的頻率下天線增益為 -3 dB,在60GHz的頻率下天線增益為 -7 dB;晶片總面積為0.8×1.39mm2。 60GHz槽孔天線方面,在51.5-65.5GHz之S11皆小於-8dB;60 GHz 的頻率下天線增益為 -1 dB;晶片總面積為1.0 × 0.8 mm2。 60GHz八木天線方面,在51.5-61 GHz之S11皆小於-10dB;60 GHz的頻率下天線增益為 -3dB;晶片總面積為0.9 × 1.38mm2 。 最後為V 頻帶平面型CMOS 濾波器,用MSL電感實現所提出的60-GHz 帶通濾波器的架構,插入損失為2.8dB在48.8GHz,量測結果顯示S11頻寬範圍是從41.3-57.7GHz。
The thesis presents the research on two sections. The first is the V-Band Planar CMOS Antennas fabricated with TSMC 0.18-μm CMOS process. The antennas include a 24/60 GHz COMS on-chip meander antenna, a V-band on-chip slot antenna and a V-band COMS on-chup Yagi antenna. A feeding network is designed in coplanar waveguide (CPW) technology. The second is the design of the V-Band Planar CMOS filter fabricated with TSMC 0.13-μm CMOS process. This filter was implemented to demonstrate the proposed filter architecture and the developed MSL inductor structure. The S11 of the 24/60GHz COMS on-chip meander antenna is less than -10dB from 10 to 25 GHz and 59 to 66.5 GHz. The maximum antenna power gain at 24 GHz is about -3 dB and maximum antenna power gain at 60 GHz is about -7 dB. The chip size is 0.8 × 1.39 mm2. The S11 of the 60GHz COMS on-chip slot antenna is less than -8dB from 51.5 to 65.5GHz. The maximum antenna power gain at 60 GHz is about -1 dB and the chip size is 1.0 × 0.8 mm2. The S11 of the 60GHz COMS on-chip yagi antenna is less than -10 dB from 51.5 to 61 GHz. The maximum antenna power gain at 60 GHz is about -3 dB and the chip size is 0.9 × 1.38 mm2 Finally, the V-Band Planar CMOS filter was implemented to demonstrate the proposed filter architecture and the developed MSL inductor structure. An insertion-loss of 2.55 dB was achieved at 62.5 GHz, An insertion-loss of 2.8 dB was achieved at 48.8 GHz and measured results show that the band pass filter has S11 bandwidth range from 41.3 to 57.7 GHz