以溶凝膠法研製氧化鋅薄膜及其特性分析

Preparation and Characterization of ZnO Thin Films By Sol-Gel Method

賴士文(Shih-Wen Lai)

指導教授 ： 梅玉貞

共同指導教授 ： 譚仕煒

健行科技大學/電資學院/電機工程所/碩士(2010年)

https://doi.org/10.6824/UCH.2010.00056

摘要

本研究是以醋酸鋅為前驅物，以溶膠凝膠法及旋轉塗佈法製程合成奈米氧化鋅(ZnO)透明導電薄膜，並探討不同的溶劑、穩定劑、莫爾數比、摻雜濃度、氣氛、與溫度對膠體薄膜之分子結構、顯微結構、結晶性及光電性質之影響，經由XRD、SEM、EDS及UV/VIS spectrophotometer測試結果顯示製作膠體溶液之不同參數與膠體薄膜在不同熱處理與退火氣氛製程環境下皆會影響薄膜表面形態之緻密度、均質性、結晶取向及透光率；而在薄膜硬度及附著度方面，我們採用ASTM D3359與D3363規格測試；研究成果表示，依據我們針對不同參數所研製之薄膜有最佳特性，對於在氧化鋅透明導電膜發展能夠提供極具參考價值。

關鍵字

溶膠凝膠法 ； 旋轉塗佈法 ； 氧化鋅 ； 熱處理 ； 退火氣氛

並列摘要

In this study, nanocrystalline zinc oxide transparent conducting films are prepared via sol-gel routes and spin coating technique, using zinc acetate as precursors. The effects of different solvent, stabilizer, molarity, atom%, annealing atmosphere and temperature of microstructural evolution, crystallinity and electro-optical on the gel films are studied. And we used X-ray diffraction (XRD), Scanning Electron Microscope (SEM), Energy Dispersion Spectrometer (EDS) and UV/VIS spectrophotometer to analysis the thin films. The results showed that prepared gel solution and gel films by varied parameter and different heat-treatment, annealing atmosphere, do affect the surface morphology, densification, homogeneity, orientation and visible transmittances. Finally we used ASTM D3359 and D3363 to text hardness and adhesiveness. The results showed that, we prepare the varied parameter of the thin films have best property, for this; we can provide useful information about zinc oxide transparent conducting films in the future.

並列關鍵字

sol-gel ； spin coating technique ； zinc oxide ； heat-treatment ； annealing atmosphere

參考文獻

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