退火對奈米多層氮化鈦/氮化鈮薄膜機械及磨耗性質之研究

An investigation of mechaical and wear properties of annealing nanomultilayered TiN/NbN films

顏懷威(Huai-Wei Yan)

指導教授 ： 劉見成

崑山科技大學/工程學院/機械工程研究所/碩士(2008年)

摘要

本文研究利用DC磁控濺鍍技術沉積TiN/NbN多層薄膜，以TiN和NbN單層交替沉積在模具鋼。探討不同層數及退火後之磨耗及機械性質。以XRD分析其晶體結構，奈米壓痕(NIP)量測薄膜之硬度、楊氏係數。
結果顯示，層數為8時，其結晶相之繞射峰強度較低，然隨著層數之增加，繞射峰之強度也隨之增強，當層數到達64層時，薄膜之從優取向以TiN(111)、NbN(220)為主，薄膜表面之結構較為緻密，孔洞相對減少，表面呈圓粒狀組織。經退火400℃持溫1小時後，薄膜經整體擴散及再結晶因素而形成結合性較好之等軸晶組織。當層數為64層時，TiN/NbN多層薄膜之硬度值及楊氏係數較優於其它層數，且塑性變形量最小，其彈性回復率高達39 %。磨耗分析結果，隨著層數之增加，摩擦係數及磨耗深度也逐漸減少。

關鍵字

氮化鈦/氮化鈮奈米多層薄膜 ； 直流磁控濺鍍 ； 摩擦係數

並列摘要

Nowadays increase of the tools lifetime appears as an important objective and the conventional solutions, mainly based on TiN, become inadequate. In order to overcome and improve its mechanical and tribological performance, TiN/NbN multilayer coatings on die steel substrates have been explored of my study. The multilayer obtained are characterized in composition by means of X-ray diffraction (XRD) techniques, Microhardness and adhesion to the substrate were studied by atomic force microscopy (AFM) and scratch tests. The morphological analysis and coating structure are studied using scanning electron microscopy (SEM), and atomic force microscopy. The film thickness is measured by a stylus profiler (XP-2 stylus profiler). Wear tests were performed on Pin-on-disk configuration and dry sliding conditions, at 3N load by using hardened steel ball.
The results of XRD pattern for different layers number. TiN/NbN multilayers caused the crystallization of the films, as represented by basically polycrystalline,TiN peak snch as (111),(200),(220), and NbN peak snch as(111),(200),(220),(311). TiN with highly (111) preferred orientation.On mechanical properties, Young，s modulus and hardness Values increase for different layers number.At 64 layers TiN/NbN multilayer films . 64 layers with the highest microhardness of 23.14Gpa. and Young，s modulus of 324Gpa.

並列關鍵字

TiN/NbN multilayers ； DC reactive magnetron sputtering ； Friction coefficient

參考文獻

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