垂直方向二氧化鈦微米柱陣列電極應用於染料敏化太陽能電池之研究

Applications of Vertically Oriented TiO2 Micro-Pillars Array on the Electrode of Dye-Sensitized Solar Cell

洪典裕(HUNG TIEN YU)

指導教授 ： 閔庭輝

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2009年)

摘要

本研究主要目的為探討垂直方向的二氧化鈦微米柱應用於染料敏化太陽能電池上，並提出一低製備成本且具有高產率、均一性的二氧化鈦微米柱的製作方法。
在電極的製作方面，先利用射頻磁控濺鍍法在ITO 玻璃上成長出厚度約為2微米的二氧化鈦薄膜，並利用黃光微影製程的方法，將所需要的電極圖案轉印至薄膜光阻上，接著利用感應偶合式電漿蝕刻系統，以CF4作為蝕刻氣體，乾式蝕刻形成柱高約為0.8 微米二氧化鈦柱狀電極。垂直直立的二氧化鈦微米柱電極應用於染料敏化太陽能電池上，藉由染料的吸附作為光敏化劑，以增加吸收光的波段與光的能量，二氧化鈦之微米柱狀電極在吸附N3染料後，發現的確可對工作電極產生更佳的光催化作用。完成的電極在去做XRD、SEM、UV吸收光譜、接觸角等量測，探討薄膜電極的特性。本研究使用的對電極是利用蒸鍍法製出的奈米白金電極，具有使電解質發生還原反應的催化效果。當二氧化鈦微米柱經染料敏化後之工作電極，和對電極均完成後，在兩電極間注入電解液並完成封裝就完成了染料敏化太陽能電池的製作。最後再對完成的太陽能電池在陽光的照射下進行性能測試。掃描式電子顯微鏡（SEM）觀察乾蝕刻後柱狀電極的表面型態，以探討二氧化鈦薄膜電極表面型態的改變對染料敏化太陽能電池的影響。

關鍵字

二氧化鈦 ； 染料敏化太陽能電池 ； 微米柱

並列摘要

In this thesis, the main purpose of this research is to discuss the applications of vertically oriented TiO2 micro-pillars on the electrode of dye-sensitized solar cell, and propose a method of prepare the TiO2 micro-pillars with low cost, high yield rate, and uniform.
In making the electrodes, the experiment method of this dissertation first uses RF reactive magnetron sputtering to growth TiO2 thin film with thickness of 2 microns on ITO glass, then use photolithography to copy to needed electrode image onto the thin film photoresist, then use ICP-Etcher system, and the CH4 as the dry etching gas is forming pillar electrodes of 0.8 microns on TiO2 film. Applications of vertically oriented TiO2 micro-pillars on the electrode of dye-sensitized solar cell, the dye as sensitizers is absorbed on completed working electrodes, increases the adsorption spectrum wave band and energy. After the N3 dye absorbing, the electrode of TiO2 micro-pillars is found with better photochemical catalysis. The completed working electrodes is measured by XRD, SEM, UV light absorption, and contact angle, discuss the membrane electrode characteristic. The Pt counter electrode was deposited on ITO glass by electron beam evaporation. The Pt electrode could increase catalysis redox from electrolyte. TiO2 micro-pillars electrode with dye is sealed on three sides of Pt electrodes with membrane of macromolecule, leaving one side open to fill with electrolytes, then fill the mixed electrolyte solution between the two electrodes, then use UV adhesive to complete the production of the dye-sensitized solar cell. Finally the completed dye-sensitized solar cell is placed on the solar simulator to measure and to calculate power and efficiency. After dry etching, the SEM shows that the TiO2 micro-pillars electrodes surface morphology, and discuss the influence of dye-sensitized solar cell to change the surface morphology.

並列關鍵字

TiO2 ； Dye-sensitized solar cells ； Micro-pillars

參考文獻

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