三自由度光學尺量测系統

A Novel Diffraction Type Three-degree-of-Freedom Laser Linear Encoder

吳星助(shing -ju)

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2006年)

摘要

光學尺主要是用來量測位移量，但若光學尺與移動軸不平行則會產生阿貝誤差，導致在量測位移量時，會產生誤差使得讀值不正確。因此本文提出三自由度光學尺，可以在量測位移的同時，即時量測出阿貝誤差，並加以補償使位移量測的結果更為準確。三自由度雷射光學尺系統於2mm行程中，滾動度誤差最大約0.6arsec、搖擺度誤差最大約0.81arsec，而線性位移誤差最大約為0.4μm，未來對於微小化與商品化非常有潛力。

並列摘要

Encoders are widely used as the positioning sensors. If the encoders and moving axis not to match, it were produced ABBA error. Three-degree-of-Freedom Laser Linear Encoder based on diffraction and interference is presented. The displacement field is measured using a polarization interference technique and the angle is measured using a near-axis optical theorem. We have developed a laser linear encoder that can detect displacements relative to an external grating scale with residual error of 200 nm and can detect angle error relative to quadrant detectors measure with residual error of 0.4 arsec.

參考文獻

系統及其光路誤差分析” 第十九屆機械工程研討會論文集。

the Dynamic Characterization of PZT’s ” , IEEE Transaction on

device：micro interlocking mechanism transfer to load”, Sensors and

Actuators 73, P.30~P.36, 1999.

HATTORI,“Characteristics of Piezoelectric Locomotive Mechanism