類人眼感測器之紅外線截止濾光片之特殊薄膜設計與製造

SPECIAL THIN FILM DESIGN AND MANUFACTURE FOR IR CUT FILTER OF AMBIENT SENSOR

林子閔(Tzu-Min Lin)

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2007年)

摘要

摘 要
光學薄膜係指在光學元件或獨立基板上，鍍上一層或多層的介質薄膜組成之膜堆以改變光波的傳遞特性，因此，可利用光學鍍膜的方式來改變光學元件所需要的特性，如：增加可見光的透光率、紅外線波段的截止等。
現今光電產業蓬勃發展，尤其在類人眼感測器（ambient sensor）方面更受到重視，由於廠商對分光特性非常重視，因此，分光特性的開發競爭也最激烈。以目前商品化的照度感測器而言，它的分光特性峰值大約是550~600nm，相當接近人眼的嚮應光譜峰值。此論文研究係利用物理成膜的方式，在矽晶光檢測基板上形成特殊的紅外線截止濾光波長，使光學薄膜所產生的效果，讓感測器的嚮應光譜特性峰值落在550~580nm間，更接近人類的視覺感應，以獲得更好的效果。
此研究過程中係利用Ti3O5跟SiO2兩種材料，再利用TFCalc軟體作多層膜設計，以獲得特殊的紅外線截止濾光薄膜。在實驗中將傳統型紅外線截止濾光薄膜與特殊型紅外線截止濾光薄膜分別在鍍在矽晶光檢測基板上作比較，結果發現傳統型所得到之響應光譜峰值落在615nm，且光譜陡度的圖形較為不平均，無法仿照人眼的視覺特性，而而本論文所設計的特殊型濾光片所得到之響應光譜峰值為560nm，且光譜圖形與國際照明委員會所制定的標準人眼photopic響應函數極為相近。

並列摘要

Abstract
The optical thin film means to plate on the optical component or the independent board previous or multi-layer film that the quality thin file contstitutes to push to change delivering of light wave characteristic . Therefore can makeuse of the way of optical thin film to change the characteristic that the optical component needs ， as increment it is thus clear that bare of deeply closing of light rate，infrared wave band etc .
Present light give or get an electric shock an industry booming development，particularil is valued more in the sensor ， due to manufacturer to cent light the characteristic values very much ， therefore cent light characteristic of development competition also the most vigorious . Commercialize currently of chine on one degree sensor ， its cent light characteristic Feng values is about 550~560 and rather near seeing of person`s eye feeling Feng value . Thisesis research is the way that makes use of physics to became a film to become on the sensor special of infrared close a eave-length ， makes the effect that the optical thin film produces let sensor for cent light characteristic Feng value fall or so near the mankind`s vision more to respond in the 550~580 ， reach better effect .
Be to use Ti3O5 and SiO2 in this research process ， Two kinds of materials make use of TFCalc software again to do several film designs ， reach special of infrared ray close filter light thin film . Close at the traditional infrared ray to filter the membrane and special infrared ray to close at and filter the membrane to plate in the silicon only measure the base plate brilliantly and comparing separately in the experiment , the response spectrum peak value received to find the traditional type left 615nm finally, and the figure of the spectrum gradient was comparatively unequal, can't imitate the vision characteristic of the human eye , but the response spectrum peak value that the special type gets is 560nm, and it is extremely close that spectrum figure and standard human eye photopic which International Commission on Illumination make respond function.

參考文獻

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參考文獻