本實驗主要在於說明如何設計光罩、利用紫外光微影電鑄模造 (UV-LIGA)技術製作出一系列之微透鏡陣列模仁,並以各種檢測之方法,檢驗其特性,以求能找出更佳的製作參數。 實驗主要分為兩大類,一是利用熱熔法做出微透鏡形狀之光阻,並利用紫外光微影電鑄模造(UV-LIGA)技術做出光阻高度為15 ?m而線寬直徑100 ?m到200 ?m之間有良好之微透鏡陣列模仁。當微透鏡陣列模仁製作出來後,再以複製成型的技術成功地製作出相似度為90% ~ 97%之的聚甲基丙烯酸甲酯(PMMA)微透鏡成品,進而達到批次生產的目的。
This experiment is mainly to describe how to design photo mask, employ UV-LIGA technology to manufacture a series of micro lens array die float and test the characteristics by each kind of testing method to find out the better manufacturing parameters. The experiment is classified as two types, where one type employs the thermal method to make the photoresist with micro-lens shape, and UV-LIGA technology is used to make a height of 15 ?m photoresist and good micro lens array die float with wire diameter from 100 ?m to 200 ?m. After micro lens array die float is manufactured, the similarity of 90% ~ 97% PMMA micro lens is successfully manufactured by the forming technology to achieve the batch production.