CCD臨界角法橫向位移量測之研究

Study on the transverse displacement measurement by uses of the critical angle method and a CCD

林逸智(Yi-Chin Lin)

指導教授 ： 邱銘宏

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2010年)

https://doi.org/10.6827/NFU.2010.00048

摘要

本論文提出CCD臨界角法橫向位移量測之研究來觀測橫向移動800lines/mm光柵的微小位移量，利用數值孔徑為0.7放大倍率為100倍以提高橫向位移的解析度，並搭配臨界角法來提升位移量測的靈敏度，再以CCD來做影像擷取，經由Matlab程式判斷及分析出光強度變化的趨勢，最後用Matlab程式換算出橫向位移量，橫向解析度在0.3μm。本實驗優點具有非接觸性、非破壞性且因使用強度法不採用干涉方法大大降低成本與相位擾動且可即時量測橫向位移量，將可應用在精密定位與加工之用途上。

關鍵字

臨界角 ； 橫向位移 ； 光柵

並列摘要

Study on the transverse displacement measurement by uses of the critical angle method and a CCD, the technique based on the critical angle method and the use of the image system of CCD is presented. We used an objective with the NA value of 0.7 and the magnification of 100 to enhance the displacement resolution and utilized the critical angle characteristic of a parallelogram prism to improve its image sensitivity. Then, the image from the CCD is resolved and analyzed using a personal computer and the Matlab program to calculated the transverse displacement. It has some advantage, such as, non-contact, non-destructive, non-interfering, and real-time measurement , low cost and sub-micron resolution.

並列關鍵字

critical angle ； transverse displacement ； Grating

參考文獻

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