以臨界角法結CCD影像擷取技術作表面形貌量測之研究

Study on the Surface Profile Measurement by Uses of the Critical Angle Method and a CCD Camera.

林振勤(Zhen-Chin Lin)

指導教授 ： 邱銘宏

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2009年)

摘要

本論文提出以臨界角強度法結合CCD影像擷取技術來量測透明待測物之表面輪廓。當一個擴束光經過透明待測物時，由於待測物的表面高度變化，造成穿透光有些微角度偏移，以致於入射至平行四邊形稜鏡時，偏離了原先靠近臨界角的角度，造成靈敏的光強度增減，再以CCD擷取光強影像。由於待測物的表面高度變化與穿透光的強度比反射率成正比，故可利用反射率變化來描繪待測物的表面形貌與輪廓。
本法最大優點為不需掃描待測物，即可獲得大範圍的待測物表面形貌。另外，本法也具有架構簡單、組裝容易、高靈敏度、高解析度等優點。

關鍵字

臨界角 ； CCD ； 表面形貌

並列摘要

In this paper, we proposed a new method based on the critical angle method and the use of a CCD camera for surface profile measurement of a transparent component, a broaden beam was normally incident at a transparent test component, and the output beam was incident into a critical angle prism for angular detecting. If there are some points with some different heights on the surface, the light passing through these point will deviated a small angle in the output, then these light incident into a prism at a specific incident angle will be changed its intensity apparently because of the steep reflection varied near at the critical angle, the surface height is proportional to the deviation angle and the intensity of light.
So, we could use this principle to measure the surface profile or the surface roughness. Using a CCD camera to catch and analyze the image is easier for us.
The method has some merits, such as easy operation, large-range measurement, real-time detection, and high resolution.

並列關鍵字

Critical Angle ； a CCD Camera ； Surface Profile

參考文獻

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