以微機電製程技術翻印表面浮雕布拉格光纖光柵之研製

The Fabrication of Surface Relief Fiber Bragg Grating by Using MEMS Technology

鄭貴文(Kuei-Wen Cheng)

指導教授 ： 莊為群

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2013年)

摘要

本研究中會利用微機電製程技術、光學全像術干涉微影(Holographic Interference Lithography)技術與黃光微影製程(Photolithography)等技術搭配製作出布拉格光柵，接著使用二甲基矽氧烷(polydimethysiloxane, PDMS)，利用烘烤後為固態之特性做出光柵模仁，並且搭配D型光纖(D-shaped optical fiber)結構，且利用研磨技術完成D型光纖結構表面研磨，並以畢氏定理和光學顯微鏡來觀測光纖研磨程度及距離核心的距離，直到接近纖蕊為止，最後以微機電製程技術翻印布拉格光柵於D型光纖之表面。
此次實驗研製了D型單模光纖，並與布拉格光柵做結合，形成了表面浮雕光纖布拉格光柵(Surface Relief Fiber Bragg Gratings)，實驗中有明顯的反射頻譜，藉由初步升溫實驗中布拉格中心波長位移，可看出此原件對外在變動有極高的靈敏度。

關鍵字

光學全像干涉微影 ； D型光纖 ； 表面浮雕光纖布拉格光柵

並列摘要

In this thesis, a procedure, based on holographic interference lithography, photolithography and MEMS technologies, was proposed to fabricate a surface-relief fiber Bragg grating on a D-shaped optical fiber.. First, a Bragg grating mold was formed on a glass substrate using the holographic interference lithography and photolithography, and after that the polymer grating structure was transferred to the surface of a D-shaped optical fiber by using the soft lithography technology.
This experimental measurement was performed by a tunable laser. The reflection spectrum validate the device could be applied to temperature sensing.

並列關鍵字

Holographic Interference Lithography ； D-shaped optical fiber ； Surface Relief Fiber Bragg Gratings

參考文獻

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