以D-型光纖為基礎之智慧型光纖感測器之研究

Study of Smart Sensors Based on D-shaped Optical Fibers

李致齊(Zhi-Qi Li)

指導教授 ： 莊為群

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2013年)

摘要

本研究使用研磨技術製作D型光纖結構，並使用光學全像干涉微影技術(Holographic Interference Lithography)與黃光微影製程(Photolithography)，將布拉格光柵成形於D型光纖表面。
在實驗製程中，會先將單模光纖與固定在凸面結構的玻璃基板上，以單模光纖研磨試片進行單邊研磨。研磨過程中，將SLD寬頻光源(Super Luminescent Diode)與光功率檢測器接於單模光纖兩端，觀察其光功率變化，推測研磨距離纖核之深度。接著使用光學全像干涉微影技術與黃光微影製程製作出布拉格光柵，使用軟式翻模技術，將布拉格光柵成形於D型光纖結構表面。
本研究成功的把布拉格光柵成形於D型光纖結構表面，由原子力顯微鏡(AFM)可觀察其光柵深度與週期。並由SLD寬頻光源與光循環器利用可調式雷射光源(Tunable Leaser)測量及記綠光學傳輸特性實驗之結果，將之研究與探討

關鍵字

光學全像干涉微影技術 ； 黃光微影製程 ； 布拉格光柵

並列摘要

In this study, we fabricate a D-shaped optical fiber by polishing technology, and the use of holographic interference lithography and photolithography was to form a Bragg grating on the surface of the D-shaped fiber.
The experimental processes are as follows. The single mode optical fiber is fixed on the convex structure of a glass, and side polished the optical fiber surface in terms of a polishing machine with polishing papers of different particle sizes, and the Super Luminescent Diode and optical power meter connected to both ends of the single-mode fiber as well to monitor the changes of the power as polishing. The power changes indicate the polished depth of the fiber. After that, a Bragg grating structure was formed on the surface on the surface of the D-shaped fiber by employing the holographic interference lithography and photolithography. The period and depth of the Bragg grating are investigated by atomic force microscope(AFM) and the reflection characteristics of the device was measured by using the tunable laser (OSA).

並列關鍵字

Holographic Interference Lithography ； Photolithography ； Bragg grating

參考文獻

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