磊晶成長氧化鋅奈米結構應用於可撓性壓電式奈米發電機系統

Flexible piezoelectric nanogenerator system with ZnO epitaxial nanostructures

楊信興(Shin-shing Yang)

指導教授 ： 方得華

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2009年)

摘要

本研究利用化學沉積法在軟性可撓式基板上，進行磊晶成長氧化鋅奈米柱狀結構。並將此奈米結構應用於奈米發電機上在液相磊晶成長方面，去探討在不同之成長時間、溫度與濃度下，對氧化鋅奈米柱狀之表面成長形態與其特性之影響 。研究結果發現隨著溫度的增加，會導致奈米線之直徑越來越大。 X光繞射發現該奈米柱呈現單晶(0002)結構，而高溫成長法呈現多晶的結構 。氧化鋅奈米結構在紫外光波段與藍光波段都有良好的峰值 。最後，製作上電極並且與氧化鋅奈米柱組裝成奈米發電機。在超聲波驅動奈米發電機，並且量測奈米發電機的電壓與電流特性並探討在不同撓曲度之電特性。

關鍵字

氧化鋅 ； 液相磊晶法 ； 奈米發電機 ； 奈米柱

並列摘要

The ZnO nanostructures were synthesized on flexible soft substrate using chemical deposition methods. We applied the epitaxial growth to produce ZnO nanorods and assembled the nanogenerator with the nanorods. ZnO nanostructures were grown using liquid solution epitaxial method. In liquid epitaxial, effects of growth temperatures, growth times, and growth concentrations on the morphology and characteristics of ZnO nanorods were discussed. The results showed when the temperatures increased, the diameters of the nanowires increased. The XRD results found that the ZnO nanowires had monocrystalline (0002) structure. The ZnO nanostructures had good peak values in ultraviolet emission and blue emission. Finally, making on top of electrode to fabricate nanogenerator with ZnO nanorods and measured micro-current driven by ultrasonic waves, and measuring its voltage and current characteristics. To explore how different deflections of the electromechanical characteristics change with the state of bending in the substrate.

並列關鍵字

ZnO ； Liquid epitaxial ； Nanogenerator ； Nanorods

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