PI型模糊控制器於微奈米平台之循跡控制

A PI-fuzzy controller for the nano-stage tracking control

謝政宏(Cheng-Hung Hsieh)

指導教授 ： 覺文郁

國立虎尾科技大學/工程學院/機械與機電工程研究所/碩士(2008年)

https://doi.org/10.6827/NFU.2008.00014

摘要

精密定位及循跡運動是機械領域裡的重要技術，可藉由控制系統以達到特定位置或依循特定軌跡運動之目的，為奈米平台所必須具備的功能。本論文利用精密機械研究中心自行開發的奈米微動平台，進行精密定位及循跡控制之研究。此奈米微動平台以撓性體所架構五軸之微動機構，可達到五自由度運動；並以壓電晶體作爲致動器，提昇定位精度且可應用在原子力定位平台上。
本論文研究在XY雙軸同時致動情況下，採用PI型模糊控制方法以降低微動平台循跡運動的誤差，同時採用田口式品質工程方法改善微動平台的模糊控制參數，以提昇控制器性能，且可將循圓輪廓誤差降低至 10nm左右。在路徑轉角循跡運動的研究中，提出利用減速有效改善微動平台在路徑轉角處的超越量之方法，以達到所要求的精密軌跡運動控制，最後由實驗結果證明可將轉角超越量降低至 15nm左右。

關鍵字

精密定位 ； 循跡控制 ； 微動平台 ； PI型模糊控制 ； 田口式品質工程方法

並列摘要

The precise positioning and tracking are the important techniques in the field of mechanics, which are also the essential functions of a nano-stage. This research uses the nano-stage which developed by the Precision Machine Center in National Formosa University to carry out precision positioning and tracking control. The nano-stage has five degree-of-freedoms allows displacement parallel to the sample surface (x-y plane) and perpendicular (z plane) to the sample surface and the corresponding angles to x (x-axis) and y (y-axis) to the increase precise positioning. The stage is actuated by the piezoelectric-actuators and flexure bodies and it can be applied to an atomic force nano-measuring machine stage.
In this paper, the PI-like fuzzy controller is used to reduce the errors of the tracking. At the same time, the Taguchi method is also introduced to tune the controller parameters and to enhance the performance of the controller. It could reduce the tracking error under 10 nm. Regarding to the right angle tracking problem, a speed reduction method is proposed to effectively reduce the overshoot problem and to improve the tracking performance of the stage. Finally, all methods to improve the tracking performance of the stage have been verified by experiments and could reduce the overshoot error under 15 nm

並列關鍵字

PI-like fuzzy control ； Taguchi method ； nano-stage

參考文獻

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