PI型模糊控制器於奈米測量機之循跡控制

本論文之目的在介紹一個六自由度奈米級精度測量機台之循跡控制研究，此六自由度奈米測量機分為兩部分，第一部分為利用五根撓性體壓電致動器所組成的四自由度(Z、θx、θy、θz)補償平台，第二部份為利用V型導軌架構成之XY雙軸滑軌平台，由音圈馬達推動之長行程平台作精密定位與循跡控制。由於音圈馬達其定位精度經由控制不易達至奈米級，因此配合使用壓電致動器來補償XY雙軸滑軌平台移動時所造成的誤差，使整個平台運動精度提高。本研究在XY雙軸平面特性下，採用PI型模糊控制方法以降低微動平台循跡運動之誤差，同時使用田口式品質工程方法改善模糊控制器參數以提升整體控制效能。此外，在轉角路徑循跡控制中，提出利用減速設計命令有效改善長行程平台之轉角路徑超越量方法，以達循跡控制所要求。最後，實驗結果顯示輪廓誤差證明在各項循跡運動控制中，可以有效地減少誤差範圍以及提昇長行程平台之循跡運動。

關鍵字

奈米測量機； PI型模糊控制；田口式品質工程方法

並列摘要

The purpose of this paper describes a six degree–of-freedom in the nano-precision measuring machine of the tracking control. The six degree-of-freedom nano-measuring machine consists of two parts, the first part includes five piezoelectric-actuators composed of four degrees-of-freedoms (Z, θx, θy, θz) compensation platform to compensate for assembly and processing errors. The second part contains V-type guide rail composed into the XY axis slide rail platform. The platform with the voice coil motor can achieve the positioning XY axis movement and tracking control. Because the voice coil motor through the control of its piezoelectric-actuators is not easy to achieve nanometer level,so with the use of piezoelectric actuators to compensate for the XY-axis moving platform slide caused by errors. It can improve the accuracy of platform motion. The study features in the XY plane under biaxial. Optimizing fuzzy controller parameters by Taguchi quality engineering method, the PI-type fuzzy controller in this paper reduces tracking error of the moving platform. In addition, the corner path tracking control. The proposed use of slow design command can effectively improve the long-travel platform of the corner path overshoot method to achieve the required tracking control. Finally, the experiments show that the proposed method is an efficient tool for improving platform tracking ability. It could effectively reduce the error range and enhance the long-travel platform tracking motion.

並列關鍵字

Nano-measuring machine ； PI-type fuzzy control ； Taguchi method

參考文獻

[1] Youshiya Egashira, Kouji Kosaka, Shinji Takada, Tetsuya Iwabuchi, Tetsuro Baba, Shiro Moriyama, Takashi Harada, Keiichi Nagamoto, Akira Nakada, Hiroshi Kubota, and Tadahiro Ohmi, “0.69 nm Resolution Ultrasonic Motor for Large Stroke Precision Stage”, IEEE-NANO, T.12 Nano-Structure I,397-402,2001

Google Scholar

[2] J. S. Chen, and I. C. Dwang, “A ballscrew drive mechanism with piezo-electric nut for reload and motion control”, International Journal of Machine Tools & Manufacture 40, 513–526 ,2000