三自由度H型線性馬達定位平台之運動控制

在線性驅動應用上，線性馬達較旋轉馬達擁有直接驅動、響應快、高精度定位、低磨損等優點，但其應用與控制器設計方面卻沒有旋轉馬達來的成熟，因此各種的控制方法仍被繼續研究。本文之三自由度H型線性馬達定位平台係由三組獨立線性馬達平台結合高精度光學尺所組成，其中平台下部與平台上部藉由旋轉軸承連結，因此平台可產生X、Y線性與θz角度三自由度運動。平台控制方面使用PID控制器，配合以基因演算法推導之調整公式，找出控制器參數來控制平台並測試其特性，以期望能達到長行程平台微米等級以下的定位精度。經實驗結果得到此平台線性位移解析度為0.1μm，線性定位誤差最大約為0.55μm。

關鍵字

線性馬達；三自由度H型定位平台；光學尺；長行程

並列摘要

The advantages of linear motor are direct motion,high precise position and low wear for comparison with the rotary motor in the linear motion industry. However, the controller design of the linear motor is undeveloped for comparison with the rotary motor. Thus, the development of control method for the linear motor has been considered an important task in accuracy enhancement. The proposed 3-DOF H-type stage is composed of three inear motor stages and high precise encoders. The upper and lower stages are connected by the high-rigidity bearing to produce the three degrees of freedom (3-DOF) motion of the stage. The PID controller is used to be motion interface in this study. The motion interface can achieve the micro-position control of the long stroke stage by using the PID controller with parameters from the PID turning rule. The measurement results show the linear position resolution is 0.1μm, position error is about 0.55μm.

並列關鍵字

Linear motor ； 3-DOF H-type stage ； encoder ； Long stroke

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