利用偏向交叉指狀電極製作與分析表面聲波寬頻濾波器

Fabricate and analyze a wideband surface acoustic wave filter using slanted finger interdigital transducer

李英峰(Ying-Feng Li)

指導教授 ： 水瑞鐏

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2009年)

https://doi.org/10.6827/NFU.2009.00096

摘要

在本論文中，主要研究的題目是寬頻表面聲波濾波器的斜交叉指狀電極(Slanted Finger Interdigital Transducer，SFIT) 特性之探討與設計，在本論文中首先介紹表面聲波元件的原理與特性，再進一步介紹寬頻表面聲波濾波器的原理及特性。在研究中依照SFIT濾波器原理設計了110MHZ-150MHZ及135MHZ-150MHZ兩種的SFIT。每一種電極都設計三種長度分別是2mm、4mm、6mm，此長度指的是電極相互交錯部份的長度，共計有六種的SIFT，設計的電極形狀委託國家奈米元件實驗室NDL (National Nano Device Laboratories)製作成光罩再透過製程做成所需要表面聲波元件，並量測其頻率響應，接著以不同膜厚ZnO薄膜鍍於電極上改善
其響應特性之研究。
關鍵字：氧化鋅，寬頻表面聲波濾波器，叉指狀電極，偏向交叉指狀電極，表面聲波。

關鍵字

氧化鋅 ； 寬頻表面聲波濾波器 ； 叉指狀電極 ； 偏向交叉指狀電極 ； 表面聲波

並列摘要

In this thesis, the main research is to study and design the slanted finger interdigital transducer (SFIT) of broadband surface acoustic wave filter. Initially, the theories and properties of surface acoustic wave device, broadband surface acoustic wave filter and RF magnetron sputtering system used to coat aluminum thin film on electrode are introduced. According to the theory of SFIT, the 110MHZ-150MHZ and 135MHZ-150MHZ SFIT. Furthermore, there are three lengths in electrode, including 2mm, 4mm, and 6mm. Therefore, six kinds of SFIT components are obtained. In fabrication of electrode, the first stage is to make the mask that has the pattern of electrode by National Nano Device Laboratories (NDL), and then the SFIT components are fabricated through semiconductor manufacturing technology. After fabricating the electrodes, the frequency response of complete SFIT components is measured. Ultimately, through the result of measurement, the research of coating different thickness of ZnO thin film to improve the frequency response of SFIT components is conducted. According to the fruit of this research, the performance of broadband surface acoustic wave filter can be known.
Keywords: SFIT, ZnO, interdigital transducer, slanted, filter, acoustic

並列關鍵字

SFIT ； ZnO ； interdigital transducer ； slanted ； filter ； acoustic

參考文獻

參考文獻

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