建構雙光束雷射干涉儀校正精密機具之檢測系統

Development of a Measurement System Using Dual-Beam Laser Interferometer for Precision Machine Tools

陳怡靜(I-Ching Chen)

指導教授 ： 覺文郁

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2009年)

摘要

本論文使用雙光束雷射干涉儀建構校正精密機具之量測系統，由於採用了非接觸式的光學檢測模式，可達成高精確度之目標，量測系統包括角度誤差量測系統與垂直度誤差量測系統。其利用具有高解析度之光學式儀器，不會受到磁場的干擾造成系統的誤差，也能適用於各種工作場合上。本系統具有低成本、高精確度、體積小、攜帶方便、架設簡易及檢測迅速等特性。
角度誤差量測系統通過使用一個雙光束雷射干涉儀、角隅稜鏡與反射鏡為設計雙光束之光路架構，使得系統產生角度誤差時，兩光束之光程改變即可檢測工具機之俯仰度誤差（Pitch error）、偏搖度誤差（Yaw error）。本實驗之驗証系統使用HP雷射干涉儀作為參照，經檢測單一機台三次實驗証實，使用本系統檢測機台重覆性之標準差可達到0.9 arcsec，而HP檢測之標準差為1.2 arcsec。
垂直度誤差量測系統由一個雙光束雷射干涉儀、反射鏡及直度反射鏡為設計雙光束之光路架構，量測兩軸之直度，比較其直度之斜率，可得垂直度誤差。本實驗之驗証系統使用了市面上公認為準確之Grid Encoder與HP雷射干涉儀，經實驗檢測單一機台三次，測得本系統檢測之機台垂直度誤差為6.0 arcsec，HP量測之垂直度誤差為10.7 arcsec，而Grid Encoder所量測之垂直度誤差為197.1 arcsec，其誤差可能來自於掃描頭本身誤差。

關鍵字

雙光束雷射干涉儀 ； 角度誤差 ； 垂直度誤差 ； 光學非接觸式檢測 ； 精密機具校正

並列摘要

A measurement system using a dual-beam laser interferometer for the calibration of precision machine tools is presented in this paper, which includes an angular error measurement module and a squareness error measurement module. It realizes a new structure of the non–contact optical measurement with the high accuracy. By using the optical instrument with high resolution, this measurement system can can resist the magnetic interference to be applied in various fields. Meanwhile, it is characterized by high accuracy, wide measurement range, low cost, ease to carry, simple installation and rapid measurement.
The angular measurement module is composed of a dual-beam laser interferometer, corner cubes and plane mirrors. When the angular error of a machine tools occurs, the pitch error and yaw error can be measured by the change of optical path. The standard deviation measured by this system can be less than 0.9 arcsec and which measured by HP system is 1.2 arcsec.
The squareness measurement module was composed of a dual-beam laser interferometer, plane mirrors and a straightness reflector. The squareness error can be obtained by comparing the slope of the straight errors. The squareness error measured by this system can achieve 6.0 arcsec, which is 10.7 arcsec by HP system and 197.1 arcsec by Grid Encoder.

並列關鍵字

dual-beam laser interferometer ； angular error ； squareness error ； non–contact optical measurement ； calibration of precision machine tools

參考文獻

[1] G. Schlrsinger, “Inspection Test on Machine Tools,” MachinerY publishing Co.Ltd, London, 1932.

[2] 范光照、王海，“三維雷射追蹤球桿系統介紹與應用”，機械月刊第二十八卷第二期，2002/2，pp. 334 ~ 344。

[3] V. S. B. Kiridena and P. M. Ferreira, “Kinematics modeling quasistatic errors of three-aXis machining centers,” Int. J. Mach. Tool Manufact, 1994, Vol. 34, No. 1, pp. 85-100.

[4] G. E. Sommargren, “Linear/angular Displacement Interferometer for Wafer Stage MetrologY,” Proc. SPIE, 1989, Vol. 1088, pp.268-272.

[5] J. Ni, P. S. Huang and S. M. Wu, “A multi-Degree-of-freedom Measuring SYstem for CMM Geometric Errors,” Trans. of ASME, J. Engng. Ind, 1992, Vol. 114, pp. 362-369.