- 學位論文
微探針素材矯直技術與矯直機械開發
The Development and Design for Straightening the Microprobe Materials
摘要
半導體產業使用之陣列懸臂式微探針卡之微探針材料，有一半以上使用錸鎢合金細線製作而成，而錸鎢合金微探針材料有兩種型態：一為矯直後裁切至特定長度，成本昂貴；一為成綑收納，成本便宜。本論文主要針對常用之錸鎢合金微探針材料－直徑0.175㎜之錸鎢合金細線，開發以軸向拉伸並控制應變量的矯直技術與矯直機械。由應力-應變試驗以及自行設計製作之手動拉伸試驗，得知拉伸量為 至 時可使0.175㎜錸鎢合金細線達矯直的標準。 直徑0.175㎜錸鎢合金細線連續矯直機械的設計，是經由用手動應變試驗機台軸向拉伸分段做出重疊矯直，進而設計製作針對直徑0.175㎜錸鎢合金細線連續矯直機械，其動作由氣壓缸所驅動；採用超薄氣壓缸對直徑0.175㎜錸鎢合金細線施予夾持壓力，並使用固定行程之長行程氣壓缸做進料、送料動作，應變量控制則是採用可變行程之氣壓缸；利用行程可變特性將軸向拉伸量控制於 ，並使用滑塊、滑軌組合；增加氣壓缸做動時之穩定性及重複性。並使用設計製作完成之直徑0.175㎜錸鎢合金細線連續矯直機械做最後完成測試，其測試結果可得符合標準之直徑0.175㎜錸鎢合金細線。
並列摘要
Most of the microprobe materials used on the array-type cantilever microprobe card in semi-conductor industry, are made of thin rhenium-tungsten alloy. The materials of rhenium tungsten alloy come in two forms. It can either come in the form that the materials are already being divided into specific length, which will be costly; or come in a bundle, which will be much cheaper. This paper will mainly discuss about the commonly used materials in the straightening machines for rhenium-tungsten alloy microprobe which is made up of rhenium tungsten alloy with a diameter of 0.175mm. Moreover, it will also discuss about the machines and techniques used for straightening the microprobe materials, designed in axial tension to control the strain. Through the strain test and the self designed experiment to test for manual tension, we have derived that the use of 0.175mm of rhenium tungsten alloy with tension between to , will achieve a standard straightening result. The earliest method for straightening is through manual straining machines to pull axially to create an overlapping result. It then evolved into the simultaneous straightening machine for rhenium tungsten alloy of diameter 0.175mm. The machine is powered by a pressure vessel. The ultra-thin pressure vessel exerts force on the 0.175mm rhenium tungsten alloy, with a fixed and long displacement to supply and provide materials. Instead, the control of strain is managed by a pressure vessel with adjustable displacements. It makes use of the adjustable distances to control the axial strain at , and improve the stability and repetition with the combination of sliders and tracks. After conducting the final test using the straightening machine, the diameter of the rhenium tungsten alloy has achieved to be 0.175mm which corresponds to the standard result.