銀摻雜氧化鋅奈米柱氣體感測元件之研製

氧化鋅是便宜又實用性的II-VI族材料。摻雜貴金屬奈米顆粒，例如銀、金和白金，用於氧化鋅奈米結構，可以提供電子給氧化鋅奈米結構，其中ZnO納米材料摻雜金屬離子被認為是不僅改善電性，並且對結晶顆粒尺寸有顯著的影響。本篇分成兩部分，第一部分是氧化鋅薄膜並用水溶液法生長銀摻雜氧化鋅奈米柱；第二部分是用熱蒸鍍做成金電極並生長銀摻雜氧化鋅奈米柱進行氣體檢測器量測應用。第一部分主要清洗基板與濺鍍晶種層並水溶液法進行生長。最後用儀器分析表面形貌(SEM)、結晶度(XRD)、光學的特性(PL)和元素含量(EDS)跟(TEM)。分析量測是使用不同方法生長和濃度進行水溶液法生長選取最佳的參數，接續會進行第二部分。第二部分是在晶種層上蒸鍍一層傳統的電極在用水溶液法進行生長。並用氣體感測器量測元件對與丙酮的特性，其中可看出銀摻雜氧化鋅奈米柱在對於丙酮感測時無法看出明顯特性，是因為銀粒子覆蓋在奈米柱上導致阻值過低所引起。

關鍵字

氧化鋅奈米柱；光感測器；銀摻雜；水熱法

並列摘要

Zinc Oxide is a cheap and useful II-VI material. Doped with noble metal nanoparticles, such as silver, gold and platinum for Zinc Oxide nanostructures can provide electronic nanostructures to Zinc Oxide, which ZnO nano materials of metal ion doping is considered not only to improve the electricity, and has a significant effect on the grain size. This article is divided into two parts, the first part is the Zinc Oxide film and water solution growth of Zinc Oxide Ag doped nanorods; the second part is made of a gold electrode by thermal evaporation and growth of silver doped nanorods were Zinc Oxide gas detector measurement application. In the first part, the main cleaning substrate was grown with sputtering seed layer and aqueous solution method. Finally, the surface morphology (SEM), crystallinity (XRD), optical properties (PL) and element content (EDS) and trace (TEM) were analyzed by means of an instrument. Analysis and measurement is to use different methods of growth and concentration of aqueous solution growth, select the best parameters, the continuation will be carried out in second parts. In the second part, a conventional electrode was deposited on the seed layer and grown in aqueous solution. And the gas sensor for measuring elements on the properties and acetone, which can be seen in Zinc Oxide Ag doped nanorods cannot see obvious characteristics in acetone sensing, because silver particles covered in nanorods leads to low resistance caused by.

並列關鍵字

Zinc Oxide nanorods ； light sensor ； silver doping ； hydrothermal method

參考文獻

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銀摻雜氧化鋅奈米柱氣體感測元件之研製

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