快速三維奈米定位器之設計與特性研究

The Design and Characteristic Research of a Fast 3-dimensional Nano-positioner

王佑麒(Yu-Chi Wang)

指導教授 ： 洪紹剛

國立交通大學/工學院/機械工程系所/碩士(2010年)

https://doi.org/10.6842/NCTU.2010.00367

摘要

本論文介紹了三自由度運動的“平行細柱群”導引和多致動器並聯機構之機械設計方法，並使多致動器並聯機構被用於奈米定位器的平面運動。本研究之三維奈米定位器具有高定位精度、緊密性，以及較低的製造成本等多項優點。其應用範圍如掃描探針顯微鏡、超精密加工及光學工程等。
“平行細柱群”的機構設計上我們利用了有限元素法分析。組裝完成之奈米定位器系統透過了一系列的實驗，展現了系統性能。奈米定位器在X軸向、Ｙ軸向與Z軸向的掃描範圍都是5μm。此外，在X軸向與Z軸向的解析度為11nm (rms)、在Y軸向的解析度為13nm (rms)，其最大工作頻率為150Hz。

關鍵字

奈米定位器 ； 壓電 ； 原子力顯微鏡 ； 平行細柱群

並列摘要

This thesis presents a mechanical design method of “thin column group” guidance and multi-actuator parallel mechanism for a three degree-of-freedom translational nano-positioner. Multi-actuator parallel mechanism is utilized to implement planar motions which are general requirements for nano-positioners. The three-dimensional nano-positioner has several advantages such as high-precision, compactness, and low-cost. This nano-positioner can be applied to scanning probe microscopy, ultra-precision machining, and optical engineering.
The critical dimensions of “thin column group” are designed by the assistance of finite element analysis. The nano-positioner system is built up and tested successfully by a series of experiments. The traveling range of this nano-positioner is 5 μm in the X-, Y-directions as well as in the Z-direction. Also, the resolution of this nano-positioner is 11 nm (rms) in the X-, Z-directions and 13 nm (rms) in the Y-direction. Its maximum working frequency is 150 Hz.

並列關鍵字

nano-positioner ； Piezoelectric ； AFM ； thin column group

參考文獻

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