利用陽極氧化鋁模板在矽基材上成長TixWyO的奈米結構材料

Fabrication and Characterizations of TixWyO Self-aligned Nanotube Arrays using Anodic Oxidation Method

李世宏(Shih-Hung Lee)

指導教授 ： 陳智

國立交通大學/工學院/工學院碩士在職專班半導體材料與製程設備組/碩士(2010年)

https://doi.org/10.6842/NCTU.2010.00769

摘要

現今製造奈米結構的方式有很多，但能夠大面積、低製程溫度、短時間內形成高順向性的奈米結構陣列，模板法製程仍有其優勢存在。近年來，陽極氧化鋁的處理技術，其實是將傳統的陽極處理技術經由改善，提昇應用領域從傳統產業技術進入奈米技術。
而本論文主要的研究方向是以陽極氧化鋁模版法為基礎輔助在矽基材上製備TixWyO的奈米結構陣列，一開始討論關於陽極氧化鋁模板於矽基材上的製程，接著在矽基材與形成氧化鋁奈米管陣列的鋁膜間鍍上TiW墊層，配合電化學陽極氧化處理，順利製造出高密度、大範圍之奈米柱陣列，並配合不同條件的鋁模板和不同成分比的Ti/W墊層討論其對奈米柱結構的影響，也透過SEM/TEM /EDS/XPS分析做初步的結構鑑定與形成機制的探討。

關鍵字

陽極氧化鋁 ； 鎢

並列摘要

Nowadays, various technologies have been reported to produce the nanostructure arrays, and the advantages to use the anodic aluminum oxide (AAO) template technology because this technology could form high-ordered and larger range nanostructure arrays with low reaction temperature at shower reaction time.
In this study, the analysis and the growth process of TixWyO nanostructure arrays which manufactured by AAO template technology were investigated. At first of my experiment was prepare AAO template on Si substrate; Second, TiW adhesion layer was sputtered on Si substrates, and then Al film was deposited on TiW / Si substrate. This structure was treated with electrochemical anodization process to form a highly order nanotube arrays. We also analyze the relationship between different TiW composition ratio/AAO template and TixWyO nanotubes structure. SEM/EDS/XPS was used to analyze the composition and discuss the forming mechanism.

並列關鍵字

anodization ； W

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