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  • 學位論文

沉積金在Si(111)表面上的兩種圖樣轉變之探討

Transition between two patterns on an Au-deposited Si(111)surface

指導教授 : 門福國
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摘要


在實驗中將金磊晶至有微小切角之Si(111)-(7×7)表面會出現兩種不同的圖形 樣式。若在600℃磊晶時,我們發現幾乎在每個平台之上台階處會有條狀之(5×2)重 構。若在700℃磊晶時,則只會在多個平台其中之一的平台表面形成完整的(5×2)重 構,而其他平台則無變化。(5×2)及(7×7)平台之比例關係是由金之磊晶量所決定。 在700℃以上熱退火後,條狀(5×2)圖樣轉變為完整之(5×2)平台圖樣。在特定條件 下(5×2)重構會呈現類似週期性結構的圖樣,表示其中可能有ㄧ long-range elastic interaction 的機制在其中。我們可以利用(5×2)的成長圖樣應用在設計奈米結構之 模板。

關鍵字

5x2 7x7

並列摘要


Two distinct patterns have been observed by depositing sub-monolayer Au onto a Si(111)-(7×7) surface with a small miscut angle. Upon depositing Au at 600℃, we find that a stripe of (5×2) reconstruction forms at the upper step edge in mostly every terrace. For 700℃ deposition, one entire terrace out of several terraces transforms into the (5×2) reconstruction while the other terraces are totally unaffected by the Au deposition. The relative population between the (5×2) and the (7×7) terrace is governed by the amount of deposited Au. After annealing at a temperature above 700℃ the striped (5×2) pattern transforms, or grows, into the (5×2)-terrace pattern. In a given condition, (5 × 2) reconstruction show a periodic-like pattern, there may have a mechanism of long-range elastic interaction incuded. One application using the (5×2) pattern as a template to grow nanostructure in designated regions will be demonstrated.

並列關鍵字

gold silicon Au Si ripening long range interaction

參考文獻


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被引用紀錄


林子敬(2014)。Properties of Cu Thin Films Grown by Sputter Deposition and Molecular Beam Epitaxy〔碩士論文,國立中正大學〕。華藝線上圖書館。https://www.airitilibrary.com/Article/Detail?DocID=U0033-2110201613585591
柯詠瀚(2015)。Effect of Surface Conditions on the Distribution of Si Adatoms on Si(111)-5×2/Au Surface〔碩士論文,國立中正大學〕。華藝線上圖書館。https://www.airitilibrary.com/Article/Detail?DocID=U0033-2110201614030040
蔡宗翰(2016)。鍺在矽(111)-(7×7)結構上島嶼成長過程〔碩士論文,國立中正大學〕。華藝線上圖書館。https://www.airitilibrary.com/Article/Detail?DocID=U0033-2110201614062479
陳家麟(2016)。鉛蒸鍍於Si(111)-(5×2)/Au表面時對表面上的亮點造成的影響〔碩士論文,國立中正大學〕。華藝線上圖書館。https://www.airitilibrary.com/Article/Detail?DocID=U0033-2110201614062583

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