SUS403不銹鋼經電弧披覆(Ti,Al,Cr)N 多層膜之表面特性研究

Study on Surface Characteristics of SUS403 Stainless Steel Coated by Multilayered (Ti,Al,Cr)N Films via Cathodic Arc Deposition

劉信宏(Shin-Hung Liu)

指導教授 ： 許正勳

大同大學/工程學院/材料工程學系所/碩士(2008年)

摘要

摘要
本研究以陰極電弧離子沉積製程披覆(Ti,Al,Cr)N多層膜，以改變轉速來控制不同週期膜厚的(Ti,Al,Cr)N多層膜，並比較沉積方向不同對薄膜特性的影響。本實驗(Ti,Al,Cr)N多層薄膜其週期膜厚在奈米尺寸的範圍。多層膜的優點在於不僅能結合單一薄膜的特性，在硬度上會有明顯的提升。
實驗結果分別以掃描式電子顯微鏡(SEM) 、X光繞射儀(XRD)、X光電子光譜儀(XPS)、輝光放電分析(GDS)觀察鍍膜微結構及組織型態；鍍膜特性方面分析有膜的附著性(Adhesion)、硬度(Hardness)、耐磨耗性(Wear)、抗腐蝕(Corrosion)性相繼來探討膜的性質變化。
　　由實驗結果顯示，直立試片鍍膜無論在機械性質或耐腐蝕性質上皆比水平試片鍍膜來得優異，且隨著轉速的提高，機械性質或耐腐蝕性質有略為提升的趨勢，其中以4rpm最好。在SUS 403不銹鋼的表面鍍膜能明顯的提昇其硬度與耐腐蝕性。

關鍵字

氮化鉻 ； 氮化鈦鋁 ； 週期厚度 ； 多層膜

並列摘要

Abstract
This research is focused on the effects of TiAlN/CrN Multilayered coatings synthesized by cathodic arc ion plating technology. The coatings were deposited using one Ti50Al50 alloy target and one Cr99.99 target with a fixed target power in all the processes, while the layer thickness was varied by various rotation speeds of the substrate holder in order to produce different nanoscale multi-layered period thickness. In the bargain, discuss the effects of different deposition direction.
The texture structure, and nanoscale multi-layer period thickness of the coatings were determined by X-ray diffraction、Scanning electron microscope and Glow discharge spectrometer for chemical analysis. Hardness and adhesion strength of the coatings were measured by Nanoindentation and Rockwell-C indentation methods, respectively. Corrosion of the coatings were measured by Polarization and immersion test.It has been found that the mechanical properties of the multi-layer
better then the SUS403 stainless steel. The potentiodynamic polarization measurements showed that for all the coatings the corrosion potential shifted to higher values as compared to the uncoated substrate. Similarly, the corrosion current density decreased for coated samples, indicating better corrosion resistance of the coated samples.

並列關鍵字

CrN、TiAlN、periodic thickness、Multilayer。

參考文獻

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