摘要
銀膠已被廣泛使用在薄膜電路製程中，特別用於薄膜電晶體及平面顯示器。傳統銀膠在半導體製程中採用網印、塗佈、紫外光硬化，過程耗時費工又大量消耗成本。噴墨技術為一項非接觸、安靜、和在電腦化控制下高速運作的技術。運用噴墨技術可以有效提高材料利用率來達到降低成本及環保的成果。 本實驗的目的在於開發可噴塗用奈米銀膠，使其能在玻璃基板上噴印出具良好附著性及優良導電性的銀金屬導線。研究重點在於可噴塗銀膠的合成及其對於玻璃基板的圖形化能力。研究初期以合成高濃度及小粒徑奈米銀膠為目的以獲得良好的導電性質。配合噴墨機台，調整黏滯係數及表面張力，製備可實際噴塗用奈米銀膠漿料。針對不同基板進行圖形噴塗測試，找尋最佳黏附性及導電性最佳之漿料及基板組合。 實驗結果顯示，單寧酸在此漿料中扮演分散、還原劑及漿料性質(黏度、表面張力)控制三種功能。當單寧酸添加量為15.79g/L的時候，可以將銀全數還原，並獲得較細的顆粒及較佳的均一性。配合SnCl2改質玻璃基板，便可成功噴塗出線寬約100μm，面電阻6.7 x 10-6Ω/cm2，均一性及附著性佳的銀導線。
並列摘要
Silver paste has been widely used for thin-film circuit fabrication process, especially for thin-film transistor and flat panel display. The usage of silver paste in traditional semiconductor fabrication process is including screen-printing, coating, and UV-curing. It was denounced with the consuming of time and cost. Ink-jet technology is a noncontact, quiet, and computerized high-speed technique. By using this technology, we can efficiently use the material to make lower cost and more environmentally-friendly. The purpose of this research is to develop an ink-jet printable nano silver paste which can be printed on glass substrate and form a well-adhesion conducting wire. The research points are the synthesis of printable silver paste and the patterning ability of it on glass substrate. The higher concentration and lower particle size is on purpose to synthesis in order to get better electric conductivity. Viscosity and surface tension is adjusted for the piezoelectric printing head to make printable paste. Finally, the nano silver paste is printing on different substrates to examine the properties of adhesion and electric conductivity. The result indicate that tannic acid is not only considered as a reducer but also effect dispersion, viscosity and surface tension of silver ink. Silver particles can be totally reduced from AgNO3 when 15.79g/L tannic acid is added. A well shape and adhesion of silver conducting wire which has 100μm width and 6.7 x 10-6Ω/cm2 sheet resistance can be printed on SnCl2 treated glass.
參考文獻
延伸閱讀
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