高科技電子業揮發性有機物污染管制理論與實務

The Theoretical and Practical Study of Pollution Control of Volatile Organic Compounds of High Technology Electronic Industries

翁興中(Shing-Chung Onn) ； 劉妙生(Miao-Shen Liu) ； 蘇艾(Ay Su) ； 劉聖幸(Sheng-Hsing Liu)

《中華技術學院學報》 30期 (2004/06) Pp. 185-207

https://doi.org/10.7095/JCIT.200406.0185

摘要

我國電子業，一直都是政府政策性開發與輔導的優勢産業。在我國衆多電子業當中，又以半導體、光電、印刷電路板三種高科技産業表現最爲亮麗。然而近年來由於電子業在國內蓬勃發展，相關業者在不斷增建新廠、擴增産能的效應下，相對於環境造成的危害，亦不容忽視。本論文研究係針對國內某區域2001年6月至2002年5月以上三種電子産業所排放或散逸揮發性有機物的八家廠商，進行製程特性分析、查核檢測、以及國內、外法規比較等，最後研擬電子相關之管制策略。
由實際檢測結果顯示：一家半導體廠商的排放量爲10.71噸/年；三家光電業廠商的排放量爲890.18噸/年；四家印刷電路板廠商的排放量爲59.50噸/年，以光電業之排放量爲電子業之大宗。經本研究推估，光電業之E廠如自2003年起依「光電製造業排放標凖草案」，其排放量應小於0.6kg/hr爲例，其2003年之削減量預估可達758噸/年，減量空間相當可觀，可見如果「光電製造業排放標凖」實施之後，其對電子業整體之削減量有很大的實質助益。
由我國與日本、荷蘭、中國大陸、美國法規比較之結果可得以下結論：(1)除我國及美國半導體業以外，其餘國家均爲單一排放標凖法，而無特定業別之排放標凖，顯示我國環保法規的發展趨勢與美國相似。(2)我國半導體法規與美國相比較，削減率規定均在90%以上，而排放量上限我國爲0.6kg/hr，而美國爲0.095kg/hr，有六倍以上之差距，是應依目前經濟以及處理技術而重新審視此排放標凖，乃相關單位所必須考量的重點。(3)我國三種電子産業與各國比較之結果，唯半導體業可達各國法規水凖；我光電業及印刷電路板業目前所規範之「固定污染源排放標凖」相較其他國家，顯得較過寬鬆，可達各國水凖之比例不高，故亦有重新檢視此法適用性之必要。(4)從整個研究結果發現，我國電子業相關法規有以下不合理之現象：(a)「三氯乙稀」於半導體業及印刷電路板業有不同之排放標凖。(b)半導體法規「流量計及濃度偵測器每季有效監測率應大於80%」之規定，存在有20%時間無法可管的漏洞。(5)綜合以上第(3)及(4)項的結果，我國光電業以及電路板業法規修正、建構的必要，以提昇我國整體空氣的品質。

關鍵字

揮發性有機物 ； 電子業 ； 排放量 ； 削減量 ； 排放標凖 ； 管制策略

並列摘要

The high technology electronic industries are the superior those in Republic of China. Under the support and the assistance of the R.O.C. government for a long time, they have grown up and become to the top industries over the world. Based on the theoretical rule considerations of the five countries and the practical testing results, the air pollution problems of volatile organic compounds (VOCs) emitted by the eight factories of the three electronic industries are evaluated. They represent the semi-conductor, the optronics, and the printed circuit board industries.
In this study, the computed results of the emission rates of the three electronic industries indicate that the on factory of the semi-conductor provides 10.71 ton-VOCs/year, 3 factories of the optronics contribute 890.18 ton VOCs/year, and 4 factories of the printed circuit board emit 59.50 ton-VOCs/year. Thus, it can be found that the optronics industry contributes the largest VOCs emission rate among the three electronic industries. Since January 1, 2003, the regulation of the emission rate of the optronics Industry became valid. The E factory of the optronics industry should be expected theoretically to provide about the reduction rate of 758 ton-VOCs/Year. Thus, it can also be anticipated furthermore that due to the regulation of the air pollution control for the optronics industry became valid since January 1, 2003, the air quality of the whole Taiwan area should also be improved significantly.
The results evaluated respectively by the rules of the 5 countries can finally be compared among them. The following conclusions can then be found: (1) Except R.O.C. and United States, the other 3 countries (Japan, Netherlands, and Mainland China) have not had the special regulations of the pollutions of the pollution control of the VOCs emission rate of the semi-conductor industry. In these 3 countries, the regulations of the single emission standard for all industries are employed to monitor the process operation of their semi-conductor Industry. (2) The reduction rate of the regulation of the semi-conductor industry is 90% for both the United States and R.O.C.. But, in R.O.C., the maximum VOCs emission rate of the regulation of the semi-conductor industry is 0.6kg/hr which is about six times of 0.095kg/hr of U.S. regulation. It means that the maximum VOCs emission rate of the R.O.C. regulation of the semi-conductor industry should be able to be corrected up if the best achieved control technology (BACT) may be imported and employed in R.O.C. (3) In this study, both the reduction rate and the emission rate of the only one semi-conductor factory are up to the standard of all regulations of the 5 countries. For the other 7 factories of both the optronics and the printed circuit board industries, the emission rates passed our regulation of the emission standard of stationary pollution sources. But, their VOCs emission rates could almost not pass the examinations of the regulations of the other 4 countries. (4) For the three electronic industries in this study, there two unreasonable facts about the R.O.C. regulations must be presented in the following: (a) First, there have different trichloroethylene emission standards between the semi-conductor and the printed circuit board industries. (b)Secondly, for the regulation of the R.O.C. semi-conductor industry, the effective measurement ratio for every season must be larger than 80%. It indicates that the other 20% invalid measurement ratio is accepted by the present regulation. (5)Based on the above results of (3) and (4), it means that the more rigorous regulations for both the optronics and the printed circuit board industries are respectively and urgently required to be corrected and constructed to improve the air quality of Taiwan.

並列關鍵字

volatile organic compounds ； electronic industry ； emission amount ； reduction amount ； emission standard ； control policy