From the previous monitoring experiences, values of any civil structure monitoring devices, including slope and bridges, will be affected by environmental variation. This experimental study will focus on the variation of MEMS (Micro Electro Mechanical Systems) 0.1° tilt meter due to slope ambient temperature. The research employs new compound material- Greenpower to enclose and install devices, replacing the traditional fixing method (i.e. using bolts and nuts). The new compound material decreases the effect of temperature changing which causes instability of fix-end components. The results of this study shows that MEMS 0.1° tilt meter can provide the real time, accurate, effective and simple management mechanism to the management units. In addition, the results of this study can be regarded as a reference for slope monitoring.