適用於光通訊波段的金屬極化分光器研製

The Fabrication of Metal Polarization Beam Splitter for Optical Communication

陳勇星(Yung-Shin Chen) ； 田萬頂(Wann-Diing Tyan) ； 呂英宗(Ying-Tsung Lu) ； 黎邦(Pong Lai) ； 伍清欽(Ching-Chin Wu)

《光學工程》 84期 (2003/12) Pp. 61-65

https://doi.org/10.30011/OE.200312.0009

摘要

本論文提出光極化態分光器的設計原理與製作方法。我們是以金屬光栅來作光極化態分光器，文中提出其理論原理，與運用繞射光學軟體Gsolver模擬計算，找出符合我們需求的適當金屬材料與其結構輪廓，並運用Lift-off材料與全像術拍攝製作出金屬光栅。我們設定的目標為金屬材料為金，光栅週期為300nm，厚度為100nm。目前已做出光栅週期為5μm，厚度為86nm的金光栅。

關鍵字

光極化態分光器 ； 金屬光栅 ； Lift-off ； 全像術

並列摘要

In this paper, we present the theory and fabrication of a metal-grating-based polarization beam splitter (PBS). The period and the aspect ratio of the metal grating were simulated with Gsolver to optimize the optical performance of the PBS. The simulation shows that the grating made of gold with the period of 300nm and the depth of 100nm is suitable to fabricate the PBS with satisfactory optical properties for the optical communication windows of 1.3μm and 1.5μm. The lift-off gold grating with the period of 5μm and the depth of 86nm that is fabricated with holography lithography is also demonstrated.

並列關鍵字

Polarization beam splitter ； Metal grating ； Lift-off ； Holography