表面聲波氣體感測器之研製與應用

Preparation and Application of Homemade Surface Acoustic Wave Gas Sensors

張宏維(Hung-Wei Chang) ； 周鈺禎(Yu-Chen Chou) ； 蔡顯仁(Hsien-Jen Tsai) ； 徐慧萍 ； 施正雄(Jeng-Shong Shih)

《化學》 65卷4期 (2007/12) Pp. 487-497

https://doi.org/10.6623/chem.2007048

摘要

表面聲波感測器(surface acoustic wave sensors)相當靈敏，偵測空氣污染物之偵測下限可低至10-12克，然市售可做學術研究之表面聲波感測器相當昂貴，本文介紹本研究室近年來自組各種成本相當低廉的氣體表面聲波感測器及應用在有機與無機污染物之偵測分析。本研究利用一價格低廉 (低於10元美金)之通訊用 315 MHz表面聲波元件，低價計數器及RS232微電腦介面組裝成氣體表面聲波感測器，並自撰微電腦程式做頻率訊號收集及數據處理。本研究利用自組之表面聲波感測器偵測有機污染物如有機酸、醛類、醇類、烷類、烯類及炔類，和無機污染物如 CO及NO_2。本研究還發展多頻道表面聲波感測系統同時偵測各種空氣污染物。

關鍵字

表面聲波感測器 ； 氣體感測器 ； 有機氣體 ； 無機氣體

並列摘要

Surface acoustic wave (SAW) sensor can be applied to detect trace pollutants in the air. Thedetection limit of an oscillating SAW sensor is reported to be as small as 10^(-12) g for air pollutants. However, the commercial SAW gas sensor is quite expensive. The recent development of inexpensiveSAW gas sensors in our laboratory is reported. The homemade SAW gas sensor is composed of alow cost (＜ 10 $USD) SAW chip for correspondence, an inexpensive counter and RS232 computerinterface with a written computer program for frequency signal acquisition and data processing. Inthis study, various SAW gas sensors with different adsorbent coatings were prepared to detect organicpollutants, e.g. carboxylic acids, aldehydes, alchohols, alkanes, alkenes, alkynes and inorganic pollutants, e.g. CO and NO_2 in the air. Furthermore, the multi-channel SAW gas detection system was also developedto detect various air pollutants simultaneously.

並列關鍵字

Surface acoustic wave (SAW) sensor ； Gas sensor ； Organic vapors ； Inorganic vapors