本研究提出可應用於生醫領域之腔體可分離式壓電薄膜微型泵(以下簡稱分離式微型泵),腔體可在使用後拋棄而保留壓電片,大幅降低製作成本。提出水平流道與垂直流道兩種版本之分離式微型泵腔體設計,分析氣密性、排氣泡能力、流量穩定性後,採用垂直流道分離式微型泵為主要設計。接著考慮設計參數如組裝時螺絲扭力、操作頻率、薄膜厚度、腔體直徑、腔體深度、薄膜柱與腔體直徑比對分離式微型泵性能的影響,找出最佳化設計參數組合。最後再對最佳化後的分離式微型泵進行效能測試,測試項目包含分離式微型泵流阻、閥件逆流現象、流量與揚程表現。 研究結果顯示,當螺絲扭力為2kgf-cm將使流量具有最大值;薄膜厚度為0.4mm時,其薄膜效果最佳流量最大;腔體深度在2mm時,可以達到最佳壓縮比,令流量最大值為14.9588ml/min;腔體直徑從15mm減少至7.5mm會增加腔體體積變形量,流量由2.0964ml/min上升為13.3776ml/min;半徑比增加會使得腔體體積變化量會大幅下降,因此最佳半徑比為0.6。最佳化分離式微型泵可提供最大流量為21.2ml/min、最大揚程為4.1kPa。
In this paper, partial throw away micropumps for use in disposable device and medical usage were designed to reduced fabrication costs. We presented two partial throw away micropumps with vertical flow channel and horizontal flow channel respectively. According to airtight, bubble tolerance and stability test, the performance of partial throw away micropumps with vertical flow channel is better than with horizontal flow channel. We also used six parameters such as torque of tighten, working frequency, membrane thickness, ratio of diameter and membrane pillar, chamber diameter and chamber depth to evaluate performance of micropump and chosen optimal performance of micropump from different combination of parameters. Furthermore, the optimal micropump has been analyzed about its flow resistance, reverse flow, flow rate and pumping head. The experimental result using water as a sample shows that parameters of 2kgf-cm torque of tighten, 0.4mm membrane thickness, 0.6 ratio of diameter and membrane pillar, 2mm chamber depth, 7.5mm chamber diameter and 120Hz working frequency is the optimal combination. Maximum flowrate of optimal micropump can reach 21.2ml/min while maximum pumping head is 4.1kPa which is higher than human blood vessel pressure, 1.4kPa.