像散式量測系統於掃針式原子力顯微鏡之設計與開發

Design and Development of Tip-scanning Atomic Force Microscope based on an Astigmatic Detection System

邱紹博(Shao-Po Chiu)

指導教授 ： 黃光裕

國立臺灣大學/工學院/機械工程學研究所/碩士(2017年)

https://doi.org/10.6342/NTU201701417

摘要

像散式原子力顯微鏡有體積較緊緻以及高量測頻寬等優點，目前的像散式原子力顯微鏡之掃描模式僅有掃樣品式，不同質量的樣品可能會影響掃描的範圍，因此在樣品製備上需要花較多的時間。本論文提出適用於像散式原子力顯微鏡的掃針方法，並設計開發適用於此方法之量測系統。透過光學模擬軟體分析出掃針模式可能造成的誤差，並利用有限元素模擬軟體探討掃描平台和夾針座的共振頻率，以及撓性導引設計時參數的選用。實驗採用雷射位移計及市售壓電掃描平台對像散式讀取頭進行校正，並以像散式讀取頭及雷射位移計對掃描平台進行量測，掃描平台尺寸為長63 mm × 寬59 mm × 高5 mm。快軸行程為5 µm，共振頻為4.5 kHz，慢軸行程為4 µm，共振頻為3.06 kHz。透過掃描樣品驗證其可行性，結果可以清楚量測高20 nm之標準樣品，並以實驗驗證此方法可在98 μm × 98 μm範圍內掃圖。

關鍵字

原子力顯微鏡 ； 壓電致動器 ； 像散式讀取頭 ； 表面輪廓掃描 ； 掃針式

並列摘要

Astigmatic atomic force microscope takes advantages of compact size and high bandwidth. Until now, only sample-scanning configuration, which takes more time to prepare sample in order to avoid changing scanning range, exists. This thesis proposes a tip-scanning method suitable for astigmatic atomic force microscope, and the detection system based on the method is also constructed. Errors of this method are estimated by optical simulation software. Finite element simulation software is also used for designing the scanner and holder. The astigmatic detection system is calibrated by commercial piezo stage and laser displacement sensor. The performances of homemade scanner are tested by astigmatic pickup head and laser displacement sensor. The dimensions of the homemade scanner are 63 mm in length, 59 mm in width and 5 mm in height. The maximum actuation stroke of fast axis is 5 µm and its resonant frequency is 4.5 kHz. The maximum actuation stroke of slow axis is 4 µm and its resonant frequency is 3.06 kHz. The feasibility of system is verified by scanning standard sample. The result indicates that the system can measure up to 20 nm in height and feasible measurement range is at least 98 μm × 98 μm.

並列關鍵字

atomic force microscope ； piezo actuator ； astigmatic pick-up head ； profile scanning ； tip-scanning

參考文獻

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