電磁吸盤式二維壓電步進器之設計開發與特性探討

Development and Research of A Two-dimensional Piezoelectric Inchworm Actuator with Magnetic Suckers

林家華(Chia-Hua Lin)

指導教授 ： 黃光裕

國立臺灣大學/工學院/機械工程學研究所/碩士(2005年)

https://doi.org/10.6342/NTU.2005.02870

摘要

掃描探針顯微技術運用的層面越來越廣，而其中關鍵的致動器元件也必須因應各種運用上的需求，增加其定位精度和致動穩定性或是適應測試環境等需求，而本論文的研究目的就是開發適用於掃描探針顯微技術的二維壓電步進器，步進器用來驅動掃瞄探針或是待測元件，提供探針快速定位以及大範圍掃描兩種功能。致動器的步進方式採用尺蠖式致動原理，為了避免多軸向疊成架構所造成之不穩定致動，以及提昇致動器之緊緻度，所以將二維致動器都整合在同一個平面上，同時採用電磁吸附方式以取代機械夾持機構，簡化夾持機構之結構使其更容易在同一平面上作動。利用一個固定導引面以及一個移動導引面，使二維致動功能結合在一起，同時提供致動器準確和穩定的位移導引。
每一維致動器都是由兩個電磁吸盤和一個壓電管組成，電磁吸盤的吸附力可以透過控制電流大小與極性達到變化，進而使壓電管之變形得以累積成為長行程與往復位移致動。電磁吸盤中整合永久磁石以及電磁線圈兩個磁場能源，再配合上適當磁迴路設計，由永久磁石提供致動器在斷電時穩固位置的磁吸力，電磁線圈則用於致動作用下釋放吸盤的功能。電磁吸盤的吸附性能和致動器之致動性能都透過實驗測試與各式模擬分析進行深入探討，進而得知各種影響因素與其效能。

關鍵字

掃瞄探針顯微術 ； 尺蠖式致動 ； 二維致動 ； 壓電管 ； 電磁吸盤 ； 共平面架構

並列摘要

As the application aspect of Scanning Probe Microscopy is getting wider, the key actuator component satisfies various demands in the application, to increase the positioning precision and actuating stability or to adapt to the testing environment. The purpose of this thesis is to develop a two-dimensional piezoelectric actuator suitable for Scanning Probe Microscopy, the actuator is used for driving the scanning probe or the measured component, providing large scale scanning as well as fast positioning of the scanning probe. The inchworm motion is used as the actuating principle, in order to avoid actuating instability caused by multi axial fold structure and to enhance the compactness of the actuator, the two-dimensional actuators are combined on the same plane, the electromagnetically absorbing way is adopted to replace the traditional clamp mechanism, and simplification of the structure makes it easier to produce a coplanar motion. By utilizing a fixed guiding plane and a movable guiding plane, the two-dimensional actuating function is combined, and it offers an accurate and a steady displacement guiding of the actuator.
Actuator of each dimension consists of two electromagnetic suckers and a piezotube, the absorbing force of the electromagnetic sucker can be altered by controlling the magnitude and polarity of electric current, and thus allows the deformation accumulation of the actuator which results in long stroke and reciprocating displacement. Magnetic field combination of permanent magnet and electromagnetic coil produce the overall electromagnetic sucker magnetic field which is cooperated with proper magnetic circuit design, the permanent magnet offers the magnetic absorbing strength to stabilize the position while power disconnected, moreover, the electromagnetic coil is used for releasing the sucker magnetism’s absorbing force while actuating. The absorbing performance of magnetic sucker and the actuating performance of actuator were carried out into deep discussion by experimental testing and analyzing of various types of simulation, and thus figured out various kinds of factors which affect its efficiency.

並列關鍵字

Scanning Probe Microscopy ； inchworm actuating ； two-dimensional actuating ； piezotube ； electromagnetic sucker ； coplanar structure

參考文獻

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