CMOS製程奈米碳管改質之氣體感測元件與光敏感測元件

Functionalized Carbon Nanotube Gas Sensor and Photosensitive Sensor with CMOS Process

蘇郅鈞(Chih-Chun Su)

指導教授 ： 黃榮堂

國立臺北科技大學/機電學院/機電整合研究所/碩士(2013年)

摘要

本研究主要為發展一種整合於CMOS製程的奈米碳管(CNTs)氣體感測元件之低溫製造方法，其製作方式是以3－aminopropyltriethoxysilane (APTS)修飾經加熱氧化的矽晶圓，使其表面形成具有氨根aminoterminated (–NH2)的自我組裝單分子層(self-assembled monolayer, SAM)，而經處理過的表面存在正電荷與氨基群能與CNTs產生化學的吸附作用，使CNTs固定於元件表面形成氣體感測薄膜，接著利用微影製程將梳狀電極結構定義出，並以蒸鍍的方式將電極沉積於其上，利用掀舉法(Lift-off)完成CNTs電極結構之製作，以亞硫醯氯(THIONYL CHLORIDE) 、二甲基甲醯胺與乙二胺改質電極結構之下的奈米碳管完成氨基改質，可偵測出低濃度的甲醛氣體。另外本研究發現奈米碳管在二氧化矽中參雜其他元素，可使感測器具有光敏特質，對於光有非常靈敏之反應。本研究之結果除了將此CNTs氣體感測元件之製程成功的應用於一般晶圓上以達量產之目的外，亦將此結果成功的整合於CMOS製程電路上達成晶片系統化(System on Chip, SoC)之目標，未來此感測元件可透過CMOS訊號處理電路達到可穿戴式（Wearable）單晶片（SoC）的目的。

關鍵字

奈米碳管 ； 自我組裝單分子層 ； 官能基化 ； 甲醛 ； 氣體感測器 ； 光敏感測器

並列摘要

The study demonstrates the low temperature fabrication of CMOS compatible gas sensor based on CNTs. To begin with, the SiO2 on the silicon wafer was modified by APTS in order to form an aminoterminated (–NH2) self-assembled monolayer (SAM), which could facilitate the chemical bonding between CNTs and amino-groups. By means of it, CNTs were immobilized on SiO2 to be the thin film of gas sensing. Photolithography and Evaporato were then implemented to develop micro parallel electrodes. At last, Lift-off was used to complete the fabrication.Complete amino-modified carbon nanotubes, can detect low concentrations of formaldehyde gas. In addition,we found that nanotubes on silica doped other elements that enable the sensor is very sensitive to light.In this study, we not only successfully apply the fabrication to the purpose of mass production, but also integrate it with CMOS circuits to achieve System on Chip (SoC).

並列關鍵字

Carbon Nanotubes (CNTs) ； SAM (self-assembled monolayer) ； Functionalization ； Formaldehyde ； Gas sensor ； photosensitive sensor

參考文獻

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