含矽類鑽碳薄膜之功能性研究

Research of functional properties on Si-doped diamond-like carbon films

陳紀佑(Chi-Yu Chen)

指導教授 ： 歐耿良

臺北醫學大學/口腔醫學院/生醫材料暨工程研究所/碩士(2011年)

摘要

類鑽碳是由碳的鍵結SP2鍵結與SP3鍵結混合所構成，因此於特性上同時擁有鑽石與石墨之特性，如高生物相容性、高硬度、化學惰性與低磨擦係數等，是近年來各界積極開發之薄膜材料。且目前盛行於類鑽碳薄膜材料中添加微量元素，以增加其應用之範圍，如添加抗菌性元素矽、銅、銀、鋅與鈦…等等，皆可提高其抗菌力等功能性。
本研究以射頻磁控濺鍍法進行摻矽類鑽碳薄膜之製備，藉由類鑽碳薄膜內摻入不同含量之矽元素，探討類鑽碳薄膜矽含量對其功能性之影響。由各種物化性分析儀得知，於表面形貌，在類鑽碳膜未摻雜矽元素時，表面碳元素團聚之顆粒較大，於矽元素之增加表面原子成核成長較為細緻，且隨著矽含之增加平均粗糙度、硬度與楊氏模數會隨之減少，且當ID/IG比值越高，硬度越低，水滴接觸角也越小。

關鍵字

類鑽碳 ； 射頻磁控濺鍍

並列摘要

Diamond-like carbon is a carbon, by sp2 bond and sp3 bond mixing compositions. Therefore, it has the characteristics of graphite and diamond, such as high biocompatibility, high hardness, chemical inertness and low friction coefficient. Thin film materials of all active development in recent years. Now often in the DLC film doped a small amount of elements to increase the scope of application. For example, want to increase the antibacterial of DLC can be added Si, Cu, Ag, Zn or Ti, the elements can be antibacterial.
In this study, RF magnetron sputtering method for silicon-doped DLC film manufacturing. DLC films by incorporation of different content of Si, Si-DLC films of Si content of its functionality. SEM shows the surface of pure DLC reunion of the large particle size, when increasing the content of the surface atoms of Si nucleation and growth in more detail. Average roughness, hardness and Young's modulus will be decrease when the Si content increased. The hardness is lower and the contact angle is smaller when the ID / IG ratio the higher.

並列關鍵字

diamond-like carbon ； RF sputter

參考文獻

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