微動平台之設計研究

Design and Analysis of A Micro-stage

江長偉(Chang-Wei Chiang)

指導教授 ： 丁鏞

中原大學/工學院/機械工程研究所/碩士(2005年)

https://doi.org/10.6840/cycu200500737

摘要

本論文為具有三軸直角座標系統奈米微定位之設計研究。採用堆疊式壓電元件結合具有微小變形之彈性平板為致動系統。其內容包括微定位平台的撓性機構之設計、ANSYS模擬分析平台的動態特性、前饋補償控制器設計以解決壓電致動器之非線性磁滯效應，及利用高精度之電容式位移感測器配合PID回饋控制器之設計，使整體奈米微定位平台之精度在設計行程為15μm可達到20nm之定位精度。

關鍵字

前饋控制器 ； 撓性機構 ； 奈米微定位平台 ； PID回饋控制器

並列摘要

In this article, a Cartisian coordinate nano positioning stage driven by stack-type piezoelectric actuator associated with elastic-plate mechanism is developed. Flexure hinge mechanism system design and analysis by ANSYS, as well as the feed-forward controller design to deal with the hysteresis effect and the feedback PID controller design associated with high-precision capacitive sensor are included. The developed nano positioning stage is able to achieve the condition of 20 nm in positing under the condition of 15μm in stoke.

並列關鍵字

nanoscale positioning stage ； PID feedback controller ； feed-forward controller ； flexure hinge mechanism

參考文獻

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