高分子薄膜機械性質模型之膜厚因素探討

Investigation on the thickness effect of mechanical property model for polymer thin film

蘇奕仁(Yi-jen Su)

指導教授 ： 廖培凱

崑山科技大學/工程學院/機械工程研究所/碩士(2009年)

摘要

本研究針對高分子薄膜機械性質模型之膜厚因素來探討，進行了實驗共使用三種不同的材料PF、DB、MEH 這三種高分子材料，各材料用旋轉塗佈機分別鍍製3 種不同膜厚試件，膜厚約200nm 至900nm。再經由奈米刮痕試驗測試，來獲得摩擦係數與刮痕深度之變化，嘗試建立一理論模型來分析不同膜厚的高分子機械性質，從於較薄膜厚之理論模型分析結果，得知參數γ及指數係數m，然後於同一鍍膜材料之相同參數γ值下，再深入分析指數係數m 隨膜厚因素的變化，由此得知m 值會隨著膜厚變異之情形。對於較厚薄膜，則以另一較簡易理論模型分析。希望經由本研究所建構出來之理論模型，能更廣泛運用在其他高分子材料薄膜之性能研究。

關鍵字

奈米磨潤 ； 高分子材料 ； 奈米刮痕

並列摘要

This research is to study the thickness effect and mechanical property model for polymer thin film. Three different monomers (PF, MEH and DB) are tested. The specimens of three polymers are spin-coated on the glass to obtain the thicknesses between 200nm and 900nm. Friction coefficients and scratching depths of polymer specimens are obtained by nano-scratching tests. Attempts were made to establish a theoretical model to analyze the mechanical property of polymer thin fim. From the experimental results and theoretical analysis, it is concluded that parameter γ is related to the category of material, while the index m in the model is related to the thickness of the thin-film.
It would be very beneficial that the theoretical model established through this research could be more widely applied to other researches on thin films of polymer materials.

並列關鍵字

Nano-triboiogy ； polymer ； Nano-scratching

參考文獻

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