本論文探討薄膜電晶體液晶顯示器(Thin Film Transistor Liquid Crystal Display, TFT-LCD)產業五代廠實廠所設置蜂巢式沸石轉輪“無焰旋轉蓄熱式燃燒爐(RRTO)”處理設備,評估其吸附濃縮焚化系統揮發性有機物(Volatile Organic Compounds, VOCs)之效能。無焰旋轉蓄熱式燃燒爐(Rotary Regenerative Thermal Oxidizer)之爐溫設定860℃~920℃,蜂巢式沸石轉輪轉速設定2.5轉/小時,系統風量1,380 3/min,脫附風量91 m3/min,脫附溫度200℃,轉輪濃縮比為1:15。VOCs 以氣體層析-火焰離子偵測器(GC-FID)加以分析,檢測項目有乙酸丁酯 (nBA),丙二醇單甲基醚(PGME),丙二醇單甲基醚酯(PGMEA),與異丙醇(IPA)。乙酸丁酯 (nBA),丙二醇單甲基醚(PGME),丙二醇單甲基醚酯(PGMEA),與異丙醇(IPA),其去除率分別可達99,84,94 與99%,顯示無焰旋轉式蓄熱式燃燒爐其可有效提昇揮發性有機物之去除。無焰式RRTO改良了原來RRTO持續母火運轉缺點,具備更節能的特性並可提昇揮發性有機物之處理效率。
This paper aims at investigating the removal efficiency of volatile organic compounds (VOCs) produced from Thin Film Transistor Liquid Crystal Display (TFT-LCD) by using Flameless Rotary Regenerative Thermal Oxidizer (RRTO). Temperature in the furnace of RRTO was maintained at 860℃~920℃. Rotary speed of RRTO was operated in 2.5 revolution/hr. Inlet gas was 1,380 m3/min and adsorption gas was 91 m3/min. Rotary concentrated ratio was 1/15. Adsorption temperature was set at 200℃. VOCs such as NBA, PGME, PGMEA and IPA were analyzed with GC-FID. Removal efficiency of NBA, PGME, PGMEA, and IPA were found to be 99, 84, 94, and 99% respectively. Results implied that flameless RRTO could improve the removal of VOCs efficiently. The flameless RRTO improved the original RRTO fire operation disadvantage with more energy-saving features and the increase of treatment efficiency.