以高電壓離子源生成摻氟類鑽碳膜之摩擦係數及相關特性研究

RESEARCH OF TRIBOLOGY AND PROPERTIES OF DLC DOPING FLUORINE BY HV-I/S CVD

張傑翔(Chieh-Hsiang Chang)

指導教授 ： 施幸祥

大同大學/工程學院/化學工程學系所/碩士(2008年)

摘要

類鑽碳DLC(Diamond Like Carbon)是一種具有高硬度、低摩擦係數、高化學穩定性之特性的薄膜，在工業上有著重要的應用。在DLC中掺雜其它元素：如添加金屬或氣體，可以提高其附著力、降低摩擦係數等相關特性，使得DLC更具不同特色與應用性。
本實驗是運用-高電壓離子源之氣相沈積法HV-I/S CVD(High Voltage Ion Source Chemical Vapor Deposition)，在DLC鍍膜製程中，分別摻入N2、CF4二種氣體，沈積生成含氮及含氟之類鑽碳薄膜。使用顯微拉曼光譜儀(Micro-Raman spectroscopy)：分析sp3、sp2之含量與變化、原子力顯微鏡(Atomic Force Microscopy)：探究薄膜表面之粗糙型態、維克氏硬度機(Vickers micro-hardness)：得知膜層提昇基材之硬度，將上述資料做詳細的彙整與分析，最後再以磨耗試驗機(Tribometer ball on disk)：測量出摩擦係數與磨耗壽命，以驗證類鑽碳薄膜的磨潤性質。得到具有低摩擦係數之一種新穎有用途的薄膜。

關鍵字

類鑽碳膜 ； 摩擦係數

並列摘要

DLC(Diamond Like Carbon) film is a kind of film with characteristics of high hardness, low friction and high chemical stability. There is important application on industry. Mixing other elements in DLC film, for example, metal or gas, can enhance the adhesive force and reduce the friction, etc. that make DLC film have different characteristics and good applicability.
This research uses the methode of HV-I/S CVD (High Voltage Ion Source Chemical Vapor Deposition) to codeposit the fluorine element and nitrogen element separately and produce DLC film by introducing the CF4 and N2 gases respectively. Using Micro-Raman spectroscopy to analyse the content of SP³、SP² and the change. To investigate the roughness of the surface of the film by using Atomic Force Microscopy. The Vickers micro-hardness is used for measure the hardness of film to realize the hardness promotion of the substrate. Finally, the Tribometer ball on disk is used to measure the friction and its life time, for finding the tribology properties of DLC. A new useful DLC film with low friction has been obtained.

並列關鍵字

Diamond Like Carbon film ； Tribology

參考文獻

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