A scanning force microscope and/or a scanning tunneling microscope were used to probe the surface morphology and the tunneling spectroscopy of YBa2Cu3Oy (YBCO) and M/YBa2Cu3Oy (M/YBCO) thin films, M = Ag, Au, etc.. The tunneling spectroscopy of YBCO and M/YBCO thin films disclosed gap structures and Coulomb staircases in its I-V curves. The results are discussed.