平面式多通道微電極陣列晶片系統之研發

Development of Two Dimensional Multi-Electrode Arrays Chip and System

陳建銘(Jian-Ming Chen)

指導教授 ： 林啟萬

國立臺灣大學/電機資訊學院/電機工程學研究所/碩士(2004年)

https://doi.org/10.6342/NTU.2004.00133

摘要

本研究利用微機電系統技術研製二維多通道微電極陣列晶片及量測平台之研發；晶片於無塵室內使用標準之光顯影術、化學濕式蝕刻及薄膜沈積技術，晶片包含玻璃基底、鉻與金合金薄膜電極及0.6微米厚度二氧化矽阻絕層，64個微電極以8 × 8矩陣方式排列，大小為40 × 40

關鍵字

多通道微電極陣列 ； 氫化非晶形矽 ； 微機電 ； 光波導 ； 量測系統

並列摘要

In this research, we reported a design and fabrication by using Micro-Electro-Mechanical-System (MEMS) processes of two dimensional planar Multi-Electrode Arrays (MEA) chip and development of measurement system for MEA chip. The MEA chips are fabricated in the clean room using standard photolithography, wet chemical etching and thin film deposition technologies. The chips are composed of a glass substrate, chromium-gold thin film electrodes and a 0.6

並列關鍵字

Waveguide ； MEMS ； Measurement System ； Hydrogenated Amorphous Silicon ； Multi-Electrodes Array

參考文獻

[1] C. A. Thomas, P. A. Springer, G. E. Loeb, Y. Berwald-Netter, and L. M. Okun, “A miniature microelectrode array to monitor the bioelectric activity of cultured cells”, Exp. Cell Res., 74, pp.61-66, 1972.

[2] G. W. Gross, E. Rieske, G. W. Kreutzberg, and A. Meyer, “A new fixed-arraymulti-microelectrode system designed for long-term monitoring of extracellular single unit neuronal activity in vitro”, Neurosci. Lett., 6, pp.101-105, 1977.

[3] S. Tatic-Lucic, Y. C. Tai, and J. A. Wright, “Silicon-Micromachined Culterued Neuron Probes For In Vivo Studies For Neural Networks”. International Conference on Solid-State Sensors and Actuators: Transducers ‘93, Yokohama, Japan, pp. 943-946, Nov. 1993.

[5] P. K. Campbell, K. E. Jones, R. J. Huber, K. W. Horch, and R. A. Normann, “A Silicon-Based, Three-Dimensional Neural Interface: Manufacturing Processes for an Intracortical Electrode Array”, IEEE Trans. Biomed. Eng., 38(8), pp. 758-768 Aug. 1991.

[6] M. O. Heuschkel, M. Fejtl, M. Raggenbass, D. Bertrand, “A three-dimensional multi-electrode array for multi-site stimulation and recording in acute brain slices”, Journal of Neuroscience Methods, 114, pp. 135-148, 2002.