Title

Microstructure Evolution of sol-gel to SnO2 Thin Film

Translated Titles

二氧化錫薄膜由溶膠-凝膠至薄膜之微結構演變

DOI

10.6409/JMSE.200203.0049

Authors

陳溪山(C. S. Chen);黃炳淮(B. H. Hwang);許子建(T. C. Hsu);盧宏陽(H. Y. Lu)

Key Words

溶膠-凝膠 ; 薄膜 ; 粉末 ; 二氧化錫 ; 微結構 ; Sal-gel ; Thin film ; Powder ; SnO2 ; Microstructure

PublicationName

材料科學與工程

Volume or Term/Year and Month of Publication

34卷1期(2002 / 03 / 01)

Page #

49 - 54

Content Language

英文

Chinese Abstract

本文以X光繞射、掃描式電子顯微鏡、穿透式電子顯微鏡、熱重分析儀及熱差分析儀研究由四氯化錫懸浮溶液至二氧化錫粉末及薄膜之微結構演變,樣品包含不同階段之產物如溶液、懸浮粒析出物、凝膠、乾膠、粉末及薄膜等。熱差分析結果顯示,當溶液之酸鹼值下降時,懸浮粒子更容易聚集,造成電子顯微鏡分析顯示,二氧化錫之結晶在懸浮粒析出物中已發生,遠比X光繞射所顯示者為早。X光繞射結果顯示凝膠中之高氯離子含量有促進二氧化錫結晶及NH4Cl•NH2OH結晶之效果。由於旋鍍之分散作用,使薄膜態之二氧化錫比對應之粉末態更不易結晶。

English Abstract

Microstructure evolution from colloidal solution of SnCl4•5H2O to SnO2 powder and thin film was examined using x-ray diffraction (XRD), scanning electron microscopy (SEM) and transmission electron microscope (TEM) in addition to thermogravimetric analysis (TGA) and differential scanning calorimetry (DSC). Samples of different stages including sol, colloidal precipitates, (wet) gel, xerogel, powder and thin films were studied. The DSC results indicate that the colloidal precipitates agglomerate more readily as the pH value of the solution decreases. SnO2 crystallization in the precipitates is observed by TEM, which indicates a much earlier commencement of crystallization than that seen in the XRD patterns. XRD results also indicate an enhancement of crystallization of SnO2 and formation of NH4Cl•NH2OH crystalline phase in the gel by a high concentration of Cl(superscript -) ions. SnO2 crystallization in the coated films does not take place as readily as that in the dry powder due to the suppression of clustering by the spinning action.

Topic Category 工程學 > 工程學總論
Times Cited
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  3. 郭宗霖(2012)。銀對氧化鎂鋅薄膜之蕭特基二極體研究。崑山科技大學光電工程研究所學位論文。2012。1-71。
  4. 蔡文傑(2013)。FePt(B4C-Ag)及FePt(BOx-Ag)顆粒薄膜之磁性與微結構研究。中興大學材料科學與工程學系所學位論文。2013。1-95。
  5. 簡濤(2014)。利用擴散製程摻雜碳與鐵對氧化鋅薄膜光電磁特性之影響。成功大學材料科學及工程學系學位論文。2014。1-110。