Semiconductor is a strategically important industry serving as a driver, enabler and indicator of technological progress. The coming wafer scale-ups will bring disruptions and dislocations in the semiconductor industry including increased industrial consolidation , new competitive standards and rules defined by those driving the wafer transition. It is important for players within the industry to be well positioned with good competitiveness and productive efficiency. In this paper, Juli focus on semiconductor equipment industry. It’s competitiveness was analyzed via Porter’s five force analysis, while pro-ductive efficiency was estimated with Data Envelopment Analysis. The results can be beneficial for cooperate strategy development. .